Muegge Products

High Volume Production Tool

High Volume Production Tool
  • Decapsulation-Tool

    Item number: MA3000D-211BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Decapsulation-Tool

    Item number: MA3000D-241BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Decapsulation-Tool

    Item number: MA3000D-281BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Decapsulation-Tool

    Item number: MA3000D-311BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-201BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-221BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    5
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-251BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-271BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist