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Plasma array (large area)
Item number: MA4000Y-013BC

Process

Etching & Deposition

Output Connection Type

Plasma area 320 mm x 320 mm

Dielectric material

Ceramics

Output Power [W]

2000

Frequency [MHz]

2450

Gas manifold

Single

Flächenplasmaquelle

More details

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Plasma array (large area)
Item number: MA4000Y-083BC

Process

Etching & Deposition

Output Connection Type

Plasma area 320 mm x 320 mm

Dielectric material

Ceramics

Output Power [W]

3000

Frequency [MHz]

2450

Gas manifold

Single

Flächenplasmaquelle

More details

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Plasma array (large area)
Item number: MA4000Y-093BC

Process

Etching & Deposition

Output Connection Type

Plasma area 320 mm x 320 mm

Dielectric material

Ceramics

Output Power [W]

2000

Frequency [MHz]

2450

Gas manifold

Single

Flächenplasmaquelle

More details

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Plasma array (large area)
Item number: MA4000Y-103BC

Process

Etching & Deposition

Output Connection Type

Plasma area 338 mm x 408 mm

Dielectric material

Ceramics

Output Power [W]

2x 2000

Frequency [MHz]

2450

Gas manifold

Single

Flächenplasmaquelle

More details

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Plasma array (large area)
Item number: MA4000Y-123BC

Process

Etching & Deposition

Output Connection Type

Plasma area 320 mm x 320 mm

Dielectric material

Ceramics

Output Power [W]

2000

Frequency [MHz]

2450

Gas manifold

Single

Flächenplasmaquelle

More details

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