Muegge Products

2x 3000

2x 3000
  • Plasma array (large area)

    Item number: MA6000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 700 mm x 226 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
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  • Plasma array (large area)

    Item number: MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
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  • Plasma array (large area)

    Item number: MA6000Y-033BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 520 mm x 340 mm
    Dielectric material
    Ceramics
    Output Power [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
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  • Power-Supply

    Item number: MP010KG-113TS

    Frequency [MHz]
    2450
    Output Power [W]
    2x 3000
    Line connection
    3~ (L1 / L2 / L3 / N / PE)
    Control circuit connection [V]
    -
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    -
    Line Frequency [Hz]
    50
    Cooling
    Air
    Pulse output power max [W]
    2x 10000
    Front-Panel (HMI)
    No Front-Panel
    Interface
    Profinet
    Interface 2
    -
    Interface 3
    -
    Interface 4
    -
    Interface 5
    -
    Width [mm (inch)]
    606 (23,86)
    Height [mm (inch)]
    2062 (81,18)
    Depth [mm (inch)]
    881 (34,69)
    Protection
    IP00
    Isolator
    No
    Power-Supply
    High-Pulse
    More details
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