Muegge Products
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Atmospheric Plasma Source
Item number: MA075KA-019BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]75000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outletouter ø131 mm. inner ø80 mm -
Down-Streem-Plasma-Source
Item number: MA100KD-013BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]100000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet-Down-Streem-Plasma-Quelle
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Plasma array (large area)
Item number: MA4000Y-013BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-083BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]3000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-093BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-103BC
ProcessEtching & DepositionOutput Connection TypePlasma area 338 mm x 408 mmDielectric materialCeramicsOutput Power [W]2x 2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-123BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-153BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldDoubleFlächenplasmaquelle