Muegge Products
208
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Power-SupplyItem number: MX3000D-170KL
Frequency [MHz]2450Output Power [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]3000Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX3000D-173KL
Frequency [MHz]2450Output Power [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX2000D-170KL
Frequency [MHz]2450Output Power [W]2000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]2000Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH2000S-250BF, MH2000S-251BF, MH2000S-252BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX2000D-173KL
Frequency [MHz]2450Output Power [W]2000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH2000S-250BF, MH2000S-251BF, MH2000S-252BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX6000D-150KG
Frequency [MHz]2450Output Power [W]6000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]6000Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4RS-232Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH6000S-250BF, MH6000S-251BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX6000D-153KG
Frequency [MHz]2450Output Power [W]6000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4RS-232Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH6000S-250BF, MH6000S-251BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX6000D-153KL
Frequency [MHz]2450Output Power [W]6000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]208Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH6000S-250BF, MH6000S-251BFPower-SupplySwitch-Mode -
Stripping-ToolItem number: MA0000D-001BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65)
