Muegge Products
400
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Decapsulation-ToolItem number: MA3000D-211BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4CF4Process gas 5SF6Process gas 6ArTemperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-241BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3CF4Process gas 4N2H2Process gas 5SF6Process gas 6N2Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-281BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2N2H2Process gas 3CF4Process gas 4N2Process gas 5-Process gas 6-Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-311BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4ArProcess gas 5CF4Process gas 6SF6Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Power-SupplyItem number: MP010KG-113TS
Frequency [MHz]2450Output Power [W]2x 3000Line connection3~ (L1 / L2 / L3 / N / PE)Control circuit connection [V]-Line Voltage [V]400Mains voltage control circuit [V]-Line Frequency [Hz]50CoolingAirPulse output power max [W]2x 10000Front-Panel (HMI)No Front-PanelInterfaceProfinetInterface 2-Interface 3-Interface 4-Interface 5-Width [mm (inch)]606 (23,86)Height [mm (inch)]2062 (81,18)Depth [mm (inch)]881 (34,69)ProtectionIP00IsolatorNoPower-SupplyHigh-Pulse -
Power-Supply
Item number: MS075KE-511DL
Frequency [MHz]915Output Power [W]75000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]400Mains voltage control circuit [V]-Line Frequency [Hz]50CoolingAir-water heat exchangerPulse output power max [W]-Front-Panel (HMI)No Front-PanelInterfaceCan-BusInterface 2-Interface 3-Interface 4-Interface 5-Width [mm (inch)]1200 (47,24)Height [mm (inch)]2250 (88,58)Depth [mm (inch)]1050 (41,84)ProtectionIP40IsolatorNoPower-SupplyLinear -
Power-SupplyItem number: MX3000D-171KN
Frequency [MHz]2450Output Power [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]400Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]6000Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4EtherNet/IPInterface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-SupplySwitch-Mode -
Power-Supply, Switch-ModeItem number: MX6000D-154KX
Frequency [MHz]2450Output Power [W]6000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]400Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4Modbus TCPInterface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH6000S-250BF, MH6000S-251BFPower-SupplySwitch-Mode
