Muegge Products
480
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Decapsulation-ToolItem number: MA1250D-114BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors-Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
GeneratorItem number: MG030KG-511KE
Frequency [MHz]915Output Power [W]30000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)-InterfaceControl panelInterface 2EtherCATInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)ProtectionIP54Output Connection TypeWR 975Output ConnectionWaveguideIsolatorNoPower-SupplySwitch-Mode -
Generator
Item number: MG050KG-511KE
Frequency [MHz]915Output Power [W]50000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)-InterfaceControl panelInterface 2EtherCATInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]1206 (47,48)Height [mm (inch)]2160 (85,04)Depth [mm (inch)]805 (31,69)ProtectionIP54Output Connection TypeWR 975Output ConnectionWaveguideIsolatorNoPower-SupplySwitch-Mode -
Power-SupplyItem number: MX010KD-155KL
Frequency [MHz]2450Output Power [W]10000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]480Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH010KS-250BFPower-SupplySwitch-Mode -
Power-SupplyItem number: MX3000D-172KL
Frequency [MHz]2450Output Power [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]480Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]6000Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX3000D-175KL
Frequency [MHz]2450Output Power [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]480Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]-Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-SupplySwitch-Mode -
Power-Supply
Item number: MX3000D-177KL
Frequency [MHz]2450Output Power [W]3000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]Line Voltage [V]480Mains voltage control circuit [V]Line Frequency [Hz]50 / 60CoolingAir / WaterPulse output power max [W]3000Front-Panel (HMI)Operating Unit with Main SwitchInterfacefront displayInterface 2Can-BusInterface 3A/DInterface 4-Interface 5-Width [mm (inch)]484 (19,06)Height [mm (inch)]128 (5,04)Depth [mm (inch)]607 (23,90)ProtectionIP20IsolatorNoRelated Magnetron HeadMH3000S-250BF, MH3000S-251BF, MH3000S-252BFPower-SupplySwitch-Mode -
Power-SupplyItem number: MS015KE-114DG
Frequency [MHz]2450Output Power [W]15000Line connection3~ (L1 / L2 / L3 / PE)Control circuit connection [V]-Line Voltage [V]480Mains voltage control circuit [V]-Line Frequency [Hz]50 / 60CoolingAirPulse output power max [W]-Front-Panel (HMI)No Front-PanelInterfaceRS-232Interface 2Control panelInterface 3-Interface 4-Interface 5-Width [mm (inch)]806 (31,73)Height [mm (inch)]2202 (86,69)Depth [mm (inch)]676,7 (26,64)ProtectionIP54IsolatorNoPower-SupplyLinear
