| Typ | |
|---|---|
| Type of tool | |
| Line Voltage [V] | |
| Process gas 1 | |
| Process gas 2 | |
| Process gas 3 | |
| Process gas 4 | |
| Process gas 5 | |
| Process gas 6 | |
| Temperature sensors | |
| Chamber size [mm (inch)] |
MUEGGE Group
Hochstrasse 4 – 6
64385 Reichelsheim
Germany
Gerling Applied Engineering, Inc.
P.O. Box 580816
Modesto, CA 95358-0816
USA
MUEGGE Group
Hochstrasse 4 – 6
64385 Reichelsheim
Germany
Gerling Applied Engineering, Inc.
P.O. Box 580816
Modesto, CA 95358-0816
USA
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