Muegge Products

CF4

CF4
  • Decapsulation-Tool

    Item number: MA1250D-114BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    -
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA1250D-112BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-201BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-221BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    5
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-251BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-271BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-291BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA3000D-301BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    5
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist