Muegge Products

CF4

CF4
  • Decapsulation-Tool

    Item number: MA3000D-241BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Decapsulation-Tool

    Item number: MA3000D-281BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    -
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA1250D-117BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    -
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist
  • Stripping-Tool

    Item number: MA1250D-118BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
    WatchlistBereits auf der Merkliste
    Watchlist