Muegge Products

O2

O2
  • Stripping-Tool

    Item number: MA3000D-201BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
  • Stripping-Tool

    Item number: MA3000D-271BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
  • Stripping-Tool

    Item number: MA3000D-291BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    -
    Process gas 6
    -
    Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)