Muegge Products
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Stripping-Tool (12)
Decapsulation-Tool (2)
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High Volume Production Tool (7)
R&D / Pilot Production Tool (7)
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245 x 245 (9.65 x 9.65) (7)
470 x 470 (18.50 x 18.50) (6)
320 x 320 (12.60 x 12.60) (1)
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400 (7)
480 (4)
208 (3)
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14 Products in
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Decapsulation-Tool
Item number: MA1250D-114BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors-Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Decapsulation-Tool
Item number: MA3000D-281BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2N2H2Process gas 3CF4Process gas 4N2Process gas 5-Process gas 6-Temperature sensors-Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Stripping-Tool
Item number: MA0000D-001BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-110BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-112BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-115BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4-Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-117BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]400Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4-Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-118BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4N2Process gas 5-Process gas 6-Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65)