Muegge Products
Product Search Results: plasma deposition
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-913BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-123BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-133BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA1250C-003BC
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]1250Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-143BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-283BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-293BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-393BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-403BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-223BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
MUEGGE Group
Hochstrasse 4 – 6
64385 Reichelsheim
Germany
Gerling Applied Engineering, Inc.
P.O. Box 580816
Modesto, CA 95358-0816
USA
MUEGGE Group
Hochstrasse 4 – 6
64385 Reichelsheim
Germany
Gerling Applied Engineering, Inc.
P.O. Box 580816
Modesto, CA 95358-0816
USA
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