{"id":17843,"date":"2020-11-24T10:26:07","date_gmt":"2020-11-24T09:26:07","guid":{"rendered":"https:\/\/stage.muegge.de\/removal-of-black-carbon-and-organic-residues\/"},"modified":"2020-11-26T09:27:08","modified_gmt":"2020-11-26T08:27:08","slug":"nettoyage-du-carbone-noir-et-des-residus-organiques","status":"publish","type":"post","link":"https:\/\/muegge-group.com\/fr\/nettoyage-du-carbone-noir-et-des-residus-organiques\/","title":{"rendered":"Nettoyage du carbone noir et des r\u00e9sidus organiques"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"17843\" class=\"elementor elementor-17843 elementor-17733\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e0f8acb elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e0f8acb\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-ead9d0b\" data-id=\"ead9d0b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5319fe8 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"5319fe8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.base\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"h5\">Re-traitement et \u00e9limination des r\u00e9sidues \u00e0 base de carbone (C) - Un d\u00e9fi non seulement pour les fabricants de semi-conducteurs<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fce7403 elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"fce7403\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Le d\u00e9p\u00f4t de mat\u00e9riaux \u00e0 base de C joue un r\u00f4le majeur dans l&#8217; industrie de semi-conducteurs. La lithographie n&#8217;est pas possible sans le photor\u00e9sist associ\u00e9. Le nettoyage des r\u00e9sidus d\u00e9pos\u00e9s sur les mat\u00e9riaux \u00e0 base de C a toujours \u00e9t\u00e9 et sera toujours un d\u00e9fi, d&#8217;autant plus que l&#8217;industrie \u00e9volue vers des mat\u00e9riaux de pointe, e.g., les mat\u00e9riaux low-k, l&#8217;oxyde dop\u00e9 C, le carbone de type diamant (DLC), le diamant. Au pr\u00e9sent le march\u00e9 du d\u00e9p\u00f4t de diamant et du diamant de laboratoire est en forte croissance ; pour s\u2019aligner avec cette croissance il est essentiel de disposer des outils appropri\u00e9s pour nettoyer les r\u00e9sidus, e.g., noir de carbone, sans endommager la structure du d\u00e9p\u00f4t, e.g., diamant.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-8052f9e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"8052f9e\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3e70ed6\" data-id=\"3e70ed6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2a35ca3 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"2a35ca3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.base\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"h5\">Plasma micro-ondes - Le nettoyage isotrope = un nettoyage doux et efficace<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f47ca7c elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"f47ca7c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>En raison de sa nature, le plasma RF expose le substrat \u00e0 une interaction \u00e9nerg\u00e9tique avec le plasma. Les ions cr\u00e9es par ce type de plasma s\u2019acc\u00e9l\u00e8rent vers le substrat entra\u00eenant des dommages physiques et la contamination des mat\u00e9riaux d\u00e9pos\u00e9s. Lors du nettoyage du carbone noir sur le diamant, une toute petite quantit\u00e9 de biais RF peut endommager la structure cristalline du diamant et en cons\u00e9quence peut produire sa d\u00e9coloration irr\u00e9versible. En revanche, les syst\u00e8mes plasma micro-ondes sont capables de nettoyer rapidement, efficacement et sans impact sur le substrat<sup>1 <\/sup>.<\/p><p>\u00a0<\/p><p>Gr\u00e2ce aux syst\u00e8mes plasma micro-ondes de MUEGGE, le transfert d&#8217;\u00e9nergie vers le substrat est extr\u00eamement faible et plus important, aucun ion n&#8217;est lib\u00e9r\u00e9 dans la chambre de traitement. En cons\u00e9quence, le substrat reste intact, le nettoyage a lieu via la r\u00e9action chimique avec du carbone noire ou des autres r\u00e9sidus \u00e0 base de carbone. La r\u00e9action \u00e9tant purement isotrope, aucune exposition directe des r\u00e9sidus au plasma n&#8217;est requise, ce qui rend ce type de plasma extr\u00eamement favorable pour le nettoyage des structures 3D telles que MEMS ou MMS.<\/p><p>\u00a0<\/p><p><sup>1 <\/sup><em>Amorn THEDSAKHULWONG and Warawoot THOWLADDA. Journal of Metals, Materials and Minerals. Vol. 18 No. 2 pp. 137-141, 2008<\/em><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-672f729 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"672f729\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-d98c0f6\" data-id=\"d98c0f6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3001044 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"3001044\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">La solution de MUEGGE - La famille de produits STP <br> <br>\n   <\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-58838d0 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"58838d0\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-5ed67c6\" data-id=\"5ed67c6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a00c1c6 elementor-widget elementor-widget-image\" data-id=\"a00c1c6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/muegge-group.com\/fr\/categories-de-produits\/systemes-plasma\/\" target=\"_blank\">\n\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"819\" src=\"https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-1024x819.jpg\" class=\"attachment-large size-large wp-image-17819\" alt=\"\" srcset=\"https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-1024x819.jpg 1024w, https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-600x480.jpg 600w, https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-300x240.jpg 300w, https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-768x614.jpg 768w, https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-1536x1229.jpg 1536w, https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007-1440x1152.jpg 1440w, https:\/\/muegge-group.com\/wp-content\/uploads\/2020\/11\/WP_MA3000D_Web_DSC00007.jpg 2000w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">MUEGGE STP <\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-35ba2b9\" data-id=\"35ba2b9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-06f0fd4 elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"06f0fd4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li>Le plasma assist\u00e9 par micro-ondes utilise efficacement l&#8217;\u00e9nergie micro-ondes pour former des esp\u00e8ces neutres hautement r\u00e9actives appel\u00e9es radicaux. Aucun ion n&#8217;est lib\u00e9r\u00e9 dans la chambre de traitement, aucun dommage ni contamination du substrat n&#8217;est cr\u00e9\u00e9. Par cons\u00e9quent, le syst\u00e8me remote-plasma assist\u00e9 par micro-ondes est id\u00e9al pour l\u2019\u00e9limination du noir de carbone sur les diamants ou le DLC. L&#8217;aspect visuel et les propri\u00e9t\u00e9s physiques du substrat sont pr\u00e9serv\u00e9s.<\/li><\/ul><ul><li>Les radicaux cr\u00e9es par le plasma micro-ondes garantissent un nettoyage chimique doux et pur. En proc\u00e9dant de cette fa\u00e7on on peut garantir un impact physique extr\u00eamement faible sur le substrat; le nettoyage isotrope des r\u00e9sidus emp\u00eache d&#8217;autres dommages du mat\u00e9riau de substrat.<\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-0bb9286 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"0bb9286\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b6550de\" data-id=\"b6550de\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5ee1b5c elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"5ee1b5c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.base\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"h5\">Plasma assist\u00e9 par micro-ondes pour l'\u00e9limination des mat\u00e9riaux residuels \u00e0 base de C<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9cdbad8 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"9cdbad8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">   <\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-368647a elementor-widget elementor-widget-image\" data-id=\"368647a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" src=\"https:\/\/muegge-group.com\/wp-content\/uploads\/elementor\/thumbs\/Figure-1-qidzlzafzos1ttvi76ww5njqdewkosi67g43k0hbuy.png\" title=\"Figure 1\" alt=\"Figure 1\" loading=\"lazy\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Figure 1: Profil des temp\u00e9ratures de chauffage et de refroidissement vs. Temps\u00a0; puissance micro-ondes PMW = 2000 W.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2806868 elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"2806868\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p class=\"MsoNormal\">La Figure 1 montre que la formation de radicaux seulement entra\u00eene peu ou pas d&#8217;interaction avec le substrat et la chambre \u00e0 plasma (basse temp\u00e9rature)\u00a0; aucun ion dans la chambre signifie un traitement sans contamination. Le processus de nettoyage chimique pur peut \u00eatre affin\u00e9 sans qu&#8217;il soit n\u00e9cessaire de prendre en compte la gravure.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c773876 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"c773876\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.base\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"h5\">Les avantages du nettoyage par plasma assist\u00e9 par micro-ondes<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-99169e9 elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"99169e9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Le plasma assist\u00e9 par micro-ondes permet d&#8217;\u00e9liminer les r\u00e9sidus \u00e0 base de carbone et du noir de carbone dans les applications de semi-conducteurs et du traitement du diamant.<br \/>Due \u00e0 ses propri\u00e9t\u00e9s physiques, le plasma assist\u00e9 par micro-ondes est sp\u00e9cialement con\u00e7u pour une gravure rapide et lisse sans l&#8217;attaque ionique typique observ\u00e9e dans les syst\u00e8mes RIE (plasma RF). Les radicaux g\u00e9n\u00e9r\u00e9s dans le plasma micro-ondes initient une r\u00e9action chimique en surface seulement. Sans des champs \u00e9lectriques mesurables et sans des ions pr\u00e9sents au niveau du substrat, aucun dommage physique induit par les ions ne se produit.<br \/>Le plasma assist\u00e9 par micro-ondes est hautement \u00e9cologique due \u00e0 la dissociation tr\u00e8s efficace des gaz de processus tels que CF<sub>4<\/sub> et NF<sub>3<\/sub>.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5ade659 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5ade659\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-034a5a5\" data-id=\"034a5a5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d7d614e elementor-widget elementor-widget-button\" data-id=\"d7d614e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.base\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t        <div class=\"elementor-button-wrapper\">\n            <a href=\"https:\/\/muegge-group.com\/fr\/rencontrez-muegge\/\" class=\"btn btn-primary-line\" role=\"button\">\n                        <span class=\"elementor-button-content-wrapper\">\n\t\t\t            <span class=\"elementor-button-text\">Rencontrez Muegge<\/span>\n\t\t<\/span>\n                    <\/a>\n        <\/div>\n        \t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Re-traitement et \u00e9limination des r\u00e9sidues \u00e0 base de carbone (C) &#8211; Un d\u00e9fi non seulement pour les fabricants de semi-conducteurs Le d\u00e9p\u00f4t de mat\u00e9riaux \u00e0 base de C joue un r\u00f4le majeur dans l&#8217; industrie de semi-conducteurs. La lithographie n&#8217;est pas possible sans le photor\u00e9sist associ\u00e9. Le nettoyage des r\u00e9sidus d\u00e9pos\u00e9s sur les mat\u00e9riaux \u00e0 [&hellip;]<\/p>\n","protected":false},"author":4,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[4451,4447,4448],"tags":[],"class_list":["post-17843","post","type-post","status-publish","format-standard","hentry","category-diamants-cvd-cultives-en-laboratoire","category-mems-fr","category-semi-conducteurs"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Nettoyage du carbone noir et des r\u00e9sidus organiques - Muegge<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/muegge-group.com\/fr\/nettoyage-du-carbone-noir-et-des-residus-organiques\/\" \/>\n<meta property=\"og:locale\" content=\"fr_FR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Nettoyage du carbone noir et des r\u00e9sidus organiques - Muegge\" \/>\n<meta property=\"og:description\" content=\"Re-traitement et \u00e9limination des r\u00e9sidues \u00e0 base de carbone (C) &#8211; Un d\u00e9fi non seulement pour les fabricants de semi-conducteurs Le d\u00e9p\u00f4t de mat\u00e9riaux \u00e0 base de C joue un r\u00f4le majeur dans l&#8217; industrie de semi-conducteurs. La lithographie n&#8217;est pas possible sans le photor\u00e9sist associ\u00e9. 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