{"id":20988,"date":"2019-12-05T11:21:42","date_gmt":"2019-12-05T10:21:42","guid":{"rendered":"https:\/\/stage.muegge.de\/photoresist-removal-after-high-dose-implant-hdis\/"},"modified":"2021-03-31T15:01:09","modified_gmt":"2021-03-31T13:01:09","slug":"photoresist-removal-after-high-dose-implant-hdis","status":"publish","type":"post","link":"https:\/\/muegge-group.com\/ko\/photoresist-removal-after-high-dose-implant-hdis\/","title":{"rendered":"\uace0 \uc120\ub7c9 \uc8fc\uc785 (HDIS) \ud6c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc81c\uac70"},"content":{"rendered":"\t\t
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\uace0\uc120\ub7c9 \uc784\ud50c\ub780\ud2b8 \uc2a4\ud2b8\ub9bd (HDIS) \u2013 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \ub3c4\uc804\uc801\uc778 \uacf5\uc815<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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“\uace0\uc120\ub7c9 \uc8fc\uc785 \ud6c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc81c\uac70\ub294 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \uc5ec\uc804\ud788 \u200b\u200b\uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \uacf5\uc815 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.
\n\ubb38\uc81c\ub294 \ud06c\ub7ec\uc2a4\ud2b8(\ub610\ub294 \uc784\ud50c\ub780\ud2b8 \uc911\uc5d0 \ud615\uc131\ub41c \uacbd\ud654 \uce35)\ub97c \ud0dc\uc6b0\uc9c0 \uc54a\uace0 \ub610 \uc138\ucc99\ud558\uae30 \ub9e4\uc6b0 \uc5b4\ub824\uc6b4 \ud0c4\ud654 \uc794\ub958 \ubb3c\uc744 \ub0a8\uae30\uc9c0 \uc54a\uace0 \ud06c\ub7ec\uc2a4\ud2b8\uc640 \uc18c\ud504\ud2b8 \ubc8c\ud06c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ubaa8\ub450 \uc81c\uac70\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \uacbd\ud654 \ub41c \uc720\uae30\ubb3c\uacfc \ube44\uc811\ucd09\uc2dd \ub808\uc9c0\uc2a4\ud2b8\ub97c \uc800\uc628\uc5d0\uc11c \uc81c\uc5b4\ud558\uc5ec \uc81c\uac70\ud558\ub294 \uac83\uc774 \uc138\ucc99\uc758 \ud575\uc2ec\uc785\ub2c8\ub2e4. “<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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\ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \ud50c\ub77c\uc988\ub9c8 \u2013 \uc5f4 \ubd80\ud558\ub97c \ucd5c\uc18c\ud654\ud558\uba74\uc11c \ub4f1\ubc29\uc131 \ub808\uc9c0\uc2a4\ud2b8\ub97c \uc81c\uac70<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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“RF-\ud50c\ub77c\uc988\ub9c8\uc758 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uae30\ud310\uc774 \ud558\uc804 \ub41c \uc885 (\uc774\uc628)\uc758 \uc0c1\ub300\uc801\uc73c\ub85c \ub192\uc740 \uc12d\ucde8\ub7c9\uc5d0 \ub178\ucd9c\ub429\ub2c8\ub2e4. \uc774\ub4e4 \uc774\uc628\uc740 \ud45c\uba74\uc5d0 \ub2ff\uc744 \ub54c \uc6b4\ub3d9 \uc5d0\ub108\uc9c0\ub97c \uc804\ub2ec\ud558\uc5ec \uae30\ud310\uc744 \uac00\uc5f4\ud569\ub2c8\ub2e4. \uace0\uc628\uc774 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ud06c\ub7ec\uc2a4\ud2b8\uc758 \ucd94\uac00 \ubca0\uc774\ud0b9 \ubc0f \uacbd\ud654\uc5d0 \uad00\uc5ec\ud558\ubbc0\ub85c \uace0\uc628\uc740 \uace0\uc120\ub7c9 \uc784\ud50c\ub780\ud2b8 \uc2a4\ud2b8\ub9bd\uc5d0 \ub9e4\uc6b0 \ubd88\ub9ac\ud569\ub2c8\ub2e4. \uae30\ud310\uc758 \ub0c9\uac01\uc740 \uae30\ud310 \uc804\uccb4\uc758 \uac00\uc5f4\uc744 \ubc29\uc9c0\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub418\uc9c0\ub9cc \uc2e4\uc81c \ubc18\uc751\uc774 \uc77c\uc5b4\ub098\ub294 \ud45c\uba74\uc758 \uad6d\ubd80\uc801 \uac00\uc5f4\uc744 \ud53c\ud560 \uc218\ub294 \uc5c6\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uadfc\ubcf8\uc801\uc778 \ubc18\uc751 (\uc774\uc628 \ubc15\ub9c9\uc99d\ucc29)\uc740 \ub0c9\uac01\uc758 \uc601\ud5a5\uc744 \ubc1b\uc9c0 \uc54a\uc73c\ubbc0\ub85c \ud3c9\uade0 \uc628\ub3c4\uac00 \ub0ae\uac8c \uc720\uc9c0 \ub418\ub354\ub77c\ub3c4 \uad6d\ubd80 \uc628\ub3c4\ub294 \uc5ec\uc804\ud788 \ub192\uac8c \uc720\uc9c0\ub429\ub2c8\ub2e4. Muegge\uc758 \ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc9c0\uc6d0 \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc744 \uc0ac\uc6a9\ud558\uba74 \uc5d0\ub108\uc9c0 \uc804\ub2ec\uc774 \uadf9\ub3c4\ub85c \ub0ae\uace0 \uacf5\uc815 \ucc54\ubc84\ub85c \ubc29\ucd9c \ub420 \uc218 \uc788\ub294 \ud558\uc804 \uc785\uc790\uac00 \ud615\uc131\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uacb0\uacfc\uc801\uc73c\ub85c \uae30\ud310\uc740 \ucc28\uac11\uac8c \uc720\uc9c0\ub418\uba70 \ubc1c\uc5f4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc81c\uac70\uc758 \ud654\ud559 \ubc18\uc751\uc774 \uc720\uc77c\ud55c \uc5f4\uc6d0\uc785\ub2c8\ub2e4.
\n\ubc18\uc751 \uc5f4\uc740 \ub808\uc9c0\uc2a4\ud2b8 \uc2a4\ud2b8\ub9bd \uacf5\uc815\uc758 \uc9c1\uc811\uc801\uc778 \uacb0\uacfc\uc774\ubbc0\ub85c \uacf5\uc815 \uc870\uac74\uc5d0 \ub530\ub77c \uc27d\uac8c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. “<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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Muegge\uc758 \uc194\ub8e8\uc158 \u2013 \uc815\ud655\ud558\uace0 \uc2e0\ub8b0\ud560 \uc218 \uc788\uc73c\uba70 \ubc18\ubcf5 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc9c0\uc6d0 \ud50c\ub77c\uc988\ub9c8\ub294 \uc5d0\ub108\uc9c0\ub97c \ud6a8\uc728\uc801\uc73c\ub85c \uc0ac\uc6a9\ud558\uc5ec \ub77c\ub514\uce7c\uc774\ub77c\uace0 \ud558\ub294 \ubc18\uc751\uc131\uc774 \ub192\uc740 \uc911\uc131 \uc785\uc790\ub97c \ud615\uc131\ud569\ub2c8\ub2e4. \uae30\ud310\uc744 \uac00\uc5f4\ud558\ub294 \uc6b4\ub3d9 \uc5d0\ub108\uc9c0\uc758 \uc6b4\ubc18\uccb4\uc778 \uc774\uc628\uc774 \ud615\uc131\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc9c0\uc6d0 \uc6d0\uaca9 \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc740 \uc628\ub3c4 \uc81c\uc5b4\uac00 \uc911\uc694\ud55c \uace0\uc120\ub7c9 \uc8fc\uc785 \ud6c4 \uc81c\uac70\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4. \ucd94\uac00 \uc911\ud569 \ub610\ub294 \ud0c4\ud654\uac00 \ubc1c\uc0dd\ud558\uc9c0 \uc54a\uace0 \uc8fc\uc785 \ub41c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ubd80\ub4dc\ub7fd\uac8c \uc81c\uac70\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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\ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc9c0\uc6d0 \ud50c\ub77c\uc988\ub9c8\uc5d0\uc11c \ubc29\ucd9c\ub418\ub294 \ub77c\ub514\uce7c\uc740 \uc190\uc0c1\ub41c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \uc21c\uc870\ub86d\uace0 \uae68\ub057\ud55c \ud654\ud559\uc801 \uc81c\uac70\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uacb0\uacfc\uc801\uc73c\ub85c \uc5f4 \ubd80\ud558\uac00 \ub9e4\uc6b0 \ub0ae\uc544 \uc190\uc0c1\ub41c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \ud0c4\ud654\uc5c6\uc774 \ub4f1\ubc29\uc131 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc81c\uac70\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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\uc800\uc628\uc5d0\uc11c \uc720\uc5f0\ud55c \uacf5\uc815 \uc81c\uc5b4\ub97c \uc704\ud55c \ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc9c0\uc6d0 \ud50c\ub77c\uc988\ub9c8<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\uadf8\ub9bc 1 : 2000W \ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc804\ub825\uc5d0\uc11c applicator \ud45c\uba74 \uc628\ub3c4 \uac00\uc5f4 \ubc0f \ub0c9\uac01 \uc2dc\uac04 \ucd08\uacfc<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t
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\uadf8\ub9bc 2 : T = 150 \u00b0C\uc5d0\uc11c CF4 \uc0ac\uc6a9 \uc720\ubb34\uc640 \uad00\uacc4\uc5c6\uc774 3000W\uc758 \uc77c\uc815\ud55c \ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \uc804\ub825\uc5d0\uc11c \ud45c\uc900 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \ud3c9\uade0 \uc0c1\ub300\uc801 \uc5d0\uce6d\ub960<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\ub77c\ub514\uce7c\ub9cc\uc758 \ud615\uc131\uc740 \ud50c\ub77c\uc988\ub9c8 \ucc54\ubc84\uc758 \uc8fc\ubcc0 \ud45c\uba74\uacfc \uac70\uc758 \ub610\ub294 \uc804\ud600 \uc0c1\ud638 \uc791\uc6a9\ud558\uc9c0 \uc54a\uc73c\uba70, \uc628\ub3c4\ub294 \ub0ae\uac8c \uc720\uc9c0\ub429\ub2c8\ub2e4 (\uadf8\ub9bc 1). \uc21c\uc218 \ud654\ud559\uc801 HDIS \ud504\ub85c\uc138\uc2a4\ub294 \uc544\ub798 3\ub2e8\uacc4 \uc81c\uac70 \uacfc\uc815\uc73c\ub85c \ubbf8\uc138 \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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  • \n\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\ud06c\ub7ec\uc2a4\ud2b8(\uaecd\uc9c8) \uc81c\uac70<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t
  • \n\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\ubc8c\ud06c \uc560\uc26c<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t
  • \n\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\uc624\ubc84 \uc560\uc26c<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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    \uc774\uc628\uc774 \uc5c6\ub2e4\ub294 \uac83\uc740 \uae30\ud310\uc744 \ucd94\uac00\ub85c \ub0c9\uac01\ud560 \ud544\uc694\uac00 \uc5c6\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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    \ub77c\ub514\uce7c \uae30\ubc18 \uace0 \uc120\ub7c9 \uc784\ud50c\ub780\ud2b8 \uc2a4\ud2b8\ub9bd\uc758 \uc7a5\uc810<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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    \uace0\uc120\ub7c9 \uc784\ud50c\ub780\ud2b8 \uc2a4\ud2b8\ub9bd (HDIS) \u2013 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \ub3c4\uc804\uc801\uc778 \uacf5\uc815 “\uace0\uc120\ub7c9 \uc8fc\uc785 \ud6c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc81c\uac70\ub294 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \uc5ec\uc804\ud788 \u200b\u200b\uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \uacf5\uc815 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. \ubb38\uc81c\ub294 \ud06c\ub7ec\uc2a4\ud2b8(\ub610\ub294 \uc784\ud50c\ub780\ud2b8 \uc911\uc5d0 \ud615\uc131\ub41c \uacbd\ud654 \uce35)\ub97c \ud0dc\uc6b0\uc9c0 \uc54a\uace0 \ub610 \uc138\ucc99\ud558\uae30 \ub9e4\uc6b0 \uc5b4\ub824\uc6b4 \ud0c4\ud654 \uc794\ub958 \ubb3c\uc744 \ub0a8\uae30\uc9c0 \uc54a\uace0 \ud06c\ub7ec\uc2a4\ud2b8\uc640 \uc18c\ud504\ud2b8 \ubc8c\ud06c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ubaa8\ub450 \uc81c\uac70\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \uacbd\ud654 \ub41c \uc720\uae30\ubb3c\uacfc \ube44\uc811\ucd09\uc2dd \ub808\uc9c0\uc2a4\ud2b8\ub97c \uc800\uc628\uc5d0\uc11c \uc81c\uc5b4\ud558\uc5ec \uc81c\uac70\ud558\ub294 […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[6067,6068],"tags":[],"class_list":["post-20988","post","type-post","status-publish","format-standard","hentry","category-mems-ko","category-semi-conductor-ko"],"acf":[],"yoast_head":"\n\uace0 \uc120\ub7c9 \uc8fc\uc785 (HDIS) \ud6c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc81c\uac70 - 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