{"id":24753,"date":"2022-03-15T15:43:23","date_gmt":"2022-03-15T14:43:23","guid":{"rendered":"https:\/\/stage.muegge.de\/duo-plasmaline-for-green-technology\/"},"modified":"2022-04-26T12:45:57","modified_gmt":"2022-04-26T10:45:57","slug":"duo-plasmaline-for-green-technology","status":"publish","type":"post","link":"https:\/\/muegge-group.com\/ko\/duo-plasmaline-for-green-technology\/","title":{"rendered":"Duo-Plasmaline for Green Technology: \uc0dd\uc0b0\uc131 \ubc0f \ucc98\ub9ac\ub7c9\uc5d0\uc11c \ud56d\uc0c1 \ud55c \ubc1c \uc55e\uc11c"},"content":{"rendered":"\t\t
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DUO-PLASMALINE<\/span>\u00a0<\/span>\uc2dc\uc2a4\ud15c\uc774<\/span>\u00a0<\/span>\uc9c0\uc18d<\/span>\u00a0<\/span>\uac00\ub2a5\ud55c<\/span>\u00a0<\/span>\uc5d0\ub108\uc9c0<\/span>\u00a0<\/span>\uc5b4\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0<\/span>\u00a0<\/span>\uc5b4\ub5bb\uac8c<\/span>\u00a0<\/span>\uc804\ub825\uc744<\/span>\u00a0<\/span>\uacf5\uae09\ud558\ub294\uc9c0<\/span><\/h2>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\ubaa8\ub450\ub294 \uac74\uac15\ud55c \ud589\uc131\uc5d0\uc11c \uc0b4\uae38 \uc6d0\ud569\ub2c8\ub2e4! \ubaa8\ub4e0 \uc0b0\uc5c5\uc758 \ud601\uc2e0\uac00\ub4e4\uc740 \ub354 \uae68\ub057\ud55c \ubbf8\ub798\ub97c \uc704\ud574 \uc5f4\uc2ec\ud788 \ub178\ub825\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubb34\ubc30\ucd9c \uc790\ub3d9\ucc28 \ubc30\ud130\ub9ac\uc640 flexible \ud0dc\uc591\uad11 \ubc1c\uc804 \ud328\ub110 \uc81c\uc870 \uad00\ub828 \uae30\uc220\uc744 \ud3ec\ud568\ud55c \uadf8\ub9b0\uc5d0\ub108\uc9c0\uc758 \ud6a8\uc728\uc131, \ud488\uc9c8 \ubc0f \ud655\uc7a5\uc131\uc740 \ub9ce\uc740 \ubc1c\uc804 \uac00\ub2a5\uc131\uc774 \uc788\uc2b5\ub2c8\ub2e4. Muegge\uc758 duo-plasma line \uc2dc\uc2a4\ud15c\uc740 \uac1c\ubc1c\uc790\ub4e4\uc774 \ud45c\uba74 \ucc98\ub9ac, \uc5d0\ub108\uc9c0 \uc0dd\uc0b0 \ubc0f \uc800\uc7a5 \ubd84\uc57c\uc5d0\uc11c \uc801\uadf9\uc801\uc73c\ub85c \uc218\uc815, \ubc0f \uac1c\ubc1c\ud560 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4. \ubcf8\ubb38\uc5d0 \uc804\ubb38\uac00\ub4e4\uc758 \uc124\uba85\uc774 duo-plasma line \uc2dc\uc2a4\ud15c\uc774 \ub192\uc740 radical \ubc00\ub3c4, \ub192\uc740 \ud50c\ub77c\uc988\ub9c8 homogeneity\ub97c \ucde8\uae09\ud558\ub294 \ubd84\uc57c\uc5d0\uc11c \uc5b4\ub5bb\uac8c \uc0ac\uc6a9\ub420 \uc218 \uc788\ub294\uc9c0 \uc774\ud574\ud558\uac8c \ub3c4\uc640\uc904 \uac83\uc785\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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1.\t\uade0\uc9c8\ud55c \ud608\uc7a5\uc744 \uc0dd\uc131\ud558\ub294 \uc911: \ub2e4\ub978 \uc2dc\uc2a4\ud15c\uc774\n<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\ub0ae\uc740 \uc555\ub825\uc5d0 \uc788\ub294 \ub9c8\uc774\ud06c\ub85c \ud50c\ub77c\uc988\ub9c8 excitation\uc740 \ub9c8\uc774\ud06c\ub85c\ud30c \ub0b4 \uc804\uae30\uc7a5\uc758 \uc790\uc720\uc804\uc790\uc758 \uac00\uc18d\ub825\uc5d0 \uc758\ud574 \uacb0\uc815\ub429\ub2c8\ub2e4. \uc774\uc0c1\uc801\uc73c\ub85c, \uac00\uc2a4\uac00 \uc774\uc628\ud654\ub420 \ub54c \uc804\uc790\ub4e4\uc740 \uc11c\ub85c \ucda9\ub3cc\ud558\uac8c \ub418\uace0 \uc911\uc131 \uc804\uc790\uc640 \ucda9\uc804\ub41c species\ub294 \ub208\uc0ac\ud0dc \ud6a8\uacfc\ub77c\ub294 \uac83\uc744 \uc0dd\uc131\ud558\ub294\ub370 \uc774\ub294 \uacb0\uad6d\uc5d0 \ud50c\ub77c\uc988\ub9c8\uc758 \uc0dd\uc131\uc744 \uc57c\uae30\ud569\ub2c8\ub2e4. \uc774 \uacfc\uc815\uc5d0\uc11c \uc9c4\uacf5 \ucc54\ubc84\uc758 \uc791\ub3d9 \uc555\ub825\uc740 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4: \uc800\uc555\uc5d0\uc11c \uac00\uc18d\ub41c \uc790\uc720\uc804\uc790\uc758 \ud3c9\uade0 \uc790\uc720 \uacbd\ub85c\ub294 \uc9c4\uacf5 \ucc54\ubc84\uc758 \uce58\uc218\ubcf4\ub2e4 \uc0c1\ub2f9\ud788 \uc9e7\uace0 \uc8fc\ubcc0 \uc628\ub3c4\uc5d0\uc11c \uc911\uc131\uc790\uc640 \uc774\uc628\uc73c\ub85c \ud2b9\uc815 \uc9c0\uc5b4\uc9c0\ub294 \ube44\ud3c9\ud615 \ud50c\ub77c\uc988\ub9c8\uac00 \ud615\uc131\ub429\ub2c8\ub2e4. \uc804\uc790, \uc790\uc720\uc804\uc790\uc758 \ud3c9\uade0 \uc790\uc720\uacbd\ub85c\uac00 \uc9c4\uacf5 \ucc54\ubc84\uc758 \uce58\uc218 \ubc94\uc704\uc5d0 \ub4e4\uc5b4\uac00\ub3c4\ub85d \uc9c4\uacf5 \ucc54\ubc84 \ub0b4\uc758 \uc555\ub825\uc774 \ub354\uc6b1 \ub0ae\ucd94\uba74, \uc790\uc720\uc804\uc790\uc640 \uc9c4\uacf5 \ucc54\ubc84\uc758 \ubcbd\uc774 \ucda9\ub3cc\ud560 \ud655\ub960\uc774 \ub9ce\uc774 \uc99d\uac00\ud558\uba70 \ud50c\ub77c\uc988\ub9c8\ub97c \uc720\uc9c0\ud558\uace0 \ubcc0\ud615\ud558\ub294\ub370 \ud544\uc218\uc801\uc778 \ub208\uc0ac\ud0dc \ud6a8\uacfc\ub97c \uc5b5\uc81c\ud569\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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\"\uc798\ubabb\ub41c \ubc29\uc2dd\uc73c\ub85c \uc555\ub825\uc744 \uac10\uc18c\uc2dc\ud0a4\uac70\ub098 \uc99d\uac00\uc2dc\ud0a4\ub294 \uac83\uc740 \ud608\uc7a5\uc758 \ud615\uc131 \ub610\ub294 \uc720\uc9c0\ub97c \uc5b5\uc81c\ud560 \uc218 \uc788\ub2e4.\"<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\ubc18\uba74\uc5d0 \uc555\ub825\uc744 \uc99d\uac00\uc2dc\ud0a4\uba74 \uc5d0\ub108\uc9c0\uac00 \uc911\uc131\uc790, \uc774\uc628 \uac19\uc740 \ubb34\uac70\uc6b4 \uc785\uc790\ub85c \ubcc0\ud558\uba70 \ud50c\ub77c\uc988\ub9c8\uac00 \uc5f4\uc911\uc131\uc790\ud654 \ub418\uac8c \ud558\uace0 \uadf8\ub85c \uc778\ud574 \ud50c\ub77c\uc988\ub9c8\uc758 \ud3ec\uc6a9\uc628\ub3c4\ub294 \uc99d\uac00\ud569\ub2c8\ub2e4. \ubc18\uba74\uc5d0, \uac00\uc2a4 \ud750\ub984\uc744 \uc99d\uac00\uc2dc\ucf1c \uc785\uc790 \ubc00\ub3c4\ub97c \ub192\uc774\uac8c \ub41c\ub2e4\uba74 \ub9c8\uc774\ud06c\ub85c\ud30c \uc5d0\ub108\uc9c0\ub97c \uc77c\uc815\ud558\uac8c \uc720\uc9c0\ud558\uba74, excitation \uc5d0\ub108\uc9c0\uac00 \ud50c\ub77c\uc988\ub9c8\ub97c \uc720\uc9c0\ud558\uae30\uc5d0 \ucda9\ubd84\ud558\uc9c0 \uc54a\uac8c \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>

\uc77c\uc815\ud55c \uc555\ub825\uc5d0\uc11c \uc804\uc790 \ubc00\ub3c4\ub97c \uc99d\uac00\uc2dc\ud0a4\uba74 \ub9c8\uc774\ud06c\ub85c\ud30c \uc804\ub2ec\uc774 \uc5b5\uc81c\ub429\ub2c8\ub2e4. \uc784\uacc4 \ubc00\ub3c4\uc5d0\uc11c \ub9c8\uc774\ud06c\ub85c\ud30c\ub294 \ub354 \uc774\uc0c1 \ud50c\ub77c\uc988\ub9c8\ub97c \ud22c\uacfc\ud558\uc9c0 \ubabb\ud558\uace0 \ubc18\uc0ac\ub418\uc5b4 \ud50c\ub77c\uc988\ub9c8\uac00 \uc804\ub3c4\uc131 \ubcbd\uacfc \uac19\uc774 \uae30\ub2a5\ud569\ub2c8\ub2e4.<\/p>

N.B \uc784\uacc4 \ubc00\ub3c4\ub294 \uc804\uc790\ud30c \uc8fc\ud30c\uc218\uc758 \uc81c\uacf1\uc5d0 \ube44\ub840\ud569\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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2.\t\uc0dd\uc0b0\uc131 \ud5a5\uc0c1 \ubc0f \uac04\ud3b8\ud55c \uc5c5\uc2a4\ucf00\uc77c\ub9c1 - Duo-Plasmaline\uc774 \ud574\uacb0\ucc45\uc785\ub2c8\ub2e4.<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\uc704 \ub0b4\uc6a9\uc758 \uc6d0\uce59\uc5d0 \ub530\ub974\uba74, \ub9ce\uc740 \uc804\uc790\ud30c \ud50c\ub77c\uc988\ub9c8 \uc18c\uc2a4\ub294 \ub9c8\uc774\ud06c\ub85c\ud30c \ud50c\ub77c\uc988\ub9c8\uc5d0\uc11c \uc804\ud615\uc801\uc73c\ub85c \ub098\ud0c0\ub098\ub294 \ub192\uc740 radical \ubc00\ub3c4\uc758 \ud6a8\uc728\uc744 \uc7a5\uc810\uc73c\ub85c \uc0ac\uc6a9\ud55c\ub2e4 \uc5ec\uaca8\uc84c\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc815\uc81c\ud30c\uc758 \ud615\uc131 \ubc0f \ub9c8\uc774\ud06c\ub85c\ud30c\uc758 \uc9c4\uacf5 \ud30c\uc7a5\uc774 \ucc98\ub9ac\ud560 \ubb3c\uc9c8\uacfc \ub3d9\uc77c\ud55c \uae30\ud558\ud559\uc801 \uce58\uc218\ub97c \uac00\uc9c8 \uc218 \uc788\ub2e4\ub294 \uc0ac\uc2e4\uc740 \uae30\ud310 \ud45c\uba74\uc758 \ubd88\uade0\uc77c\ud55c \ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac\ub97c \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub300\ud615 \uae30\ud310\uc5d0 \ub300\ud55c \ub9c8\uc774\ud06c\ub85c\ud30c \ud50c\ub77c\uc988\ub9c8 \uc18c\uc2a4\uc758 scaling-up\uc740 \uc911\uc694\ud55c \uacfc\uc81c\uc785\ub2c8\ub2e4. Duo-plasma line \uc740 \uc774\ub7ec\ud55c \ubb38\uc81c\ub97c \uc644\ubcbd\ud558\uac8c \ud574\uacb0\ud569\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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3.\t\uc81c\ud488 \ud488\uc9c8 \ud5a5\uc0c1 - \ub3d9\uc885 \ud50c\ub77c\uc988\ub9c8\ub97c \uc704\ud55c Duo-Plasmaline<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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Duo-plasma line\uc740 \uc800\uc555 \ud50c\ub77c\uc988\ub9c8 \uc18c\uc2a4\uc785\ub2c8\ub2e4. \ud50c\ub77c\uc988\ub9c8\ub294 \ucd94\uac00 \uc790\uae30\uc7a5\uc758 \uc601\ud5a5 \uc5c6\uc774 \ub9c8\uc774\ud06c\ub85c\ud30c excitation\uc5d0 \uc758\ud574\uc11c\ub9cc \ud615\uc131\ub429\ub2c8\ub2e4. \uac04\ub2e8\ud788 \ub9d0\ud558\uc790\uba74 Duo-plasma line\uc740 \ub9c8\uc774\ud06c\ub85c\ud30c\ub85c\ubd80\ud130 \uc601\ud5a5\uc744 \ubc1b\uc740 \uc5ed \ud615\uad11\uc131 \ud29c\ube0c\uc785\ub2c8\ub2e4: \ub3d9\ucd95\uc120\uc740 \uc804\uacf5 \ubc30\uc2ac\uc744 \ud1b5\ud574 \uc7a5\ucc29\ub429\ub2c8\ub2e4. \uc989 \uc804\uc790 \uc804\ub3c4 \ubb3c\uc9c8\ub85c \ub9cc\ub4e4\uc5b4\uc9c0\uace0 \uc591\ucabd\uc758 \ub9c8\uc774\ud06c\ub85c\ud30c\uc5d0 \uc758\ud574 \uad6c\ub3d9\ub429\ub2c8\ub2e4. \uc9c4\uacf5 \ubc30\uc2ac \uc548\ucabd\uc5d0\uc11c, \uc678\ubd80 \ub3d9\ucd95 \ub3c4\uccb4\ub294 \uc720\ub9ac, \uc11d\uc601, \uc138\ub77c\ubbf9\uc73c\ub85c \ub9cc\ub4e4\uc5b4\uc9c4 \uc720\uc804\uad00\uc73c\ub85c \uad50\uccb4\ub429\ub2c8\ub2e4. \uc720\uc804\uad00 \uc548\ucabd\uc740 \ub300\uae30\uc555\uc5d0 \uc788\uace0 \uc678\ubd80 \uc9c4\uacf5 \ubc30\uc2ac\uc74010Pa \uadf8\ub9ac\uace0 1000Pa \uc0ac\uc774\uc758 \ub0ae\uc740 \uc555\ub825\uc5d0 \uc788\uc2b5\ub2c8\ub2e4. \u00a0\ub9c8\uc774\ud06c\ub85c\ud30c\ub294 \uc720\uc804\uad00\uc744 \ud1b5\uacfc\ud558\uc5ec \uc9c4\uacf5 \uc6a9\uae30\uc758 \uc800\uc555 \uc601\uc5ed\uc73c\ub85c \uc804\ud30c\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c\ud30c\uc758 \uc804\uacc4 \uac15\ub3c4\uac00 \ud30c\uad34 \uc804\uacc4 \uac15\ub3c4\ub97c \ucd08\uacfc\ud558\uba74 \uc678\ubd80 \ub3d9\ucd95 \ub3c4\uccb4\uac00 \uc720\uc804\uad00\uc73c\ub85c \ub300\uccb4\ub418\ub294 Duo-plasma line\uc758 \uc591\ub2e8 \uc800\uc555 \uc601\uc5ed\uc5d0\uc11c \ubc29\uc804\uc774 \ubc1c\ud654\ub429\ub2c8\ub2e4. Duo-Plasma line \uc591\ub05d\uc758 \uc9e7\uc740 \ud50c\ub77c\uc988\ub9c8 \u2019hoses\u2019\ub294 \uc804\uae30 \uc804\ub3c4\uc131 \ub9e4\uccb4\uc774\uba70 \ub204\ub77d\ub41c \uc678\ubd80 \ub3d9\ucd95 \ub3c4\uccb4\ub97c \ub300\uccb4\ud569\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c\ud30c \ucd9c\ub825\uc774 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \ud50c\ub77c\uc988\ub9c8\ub294 axially homogeneous\uac00 \ud615\uc131\ub420 \ub54c \uae4c\uc9c0 \uc720\uc804\uad00\uc744 \ub530\ub77c \uc591\ucabd \ub05d\uc5d0\uc11c \uc5f0\uc7a5\ub429\ub2c8\ub2e4. -\uadf8\ub9bc 1 \ucc38\uc870<\/p>

\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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\uadf8\ub9bc<\/span>\u00a0<\/span>1:<\/span><\/span><\/span><\/span>\u00a0<\/span>Duo-Plasmaline<\/span>\u00a0<\/span>\uc800\uc555<\/span>\u00a0<\/span>\ub9c8\uc774\ud06c\ub85c\ud30c<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\uc18c\uc2a4[1]<\/span>\u00a0<\/span>\uc8fc\uc704\uc5d0<\/span>\u00a0<\/span>\ud615\uc131\ub41c<\/span>\u00a0<\/span>\ucd95<\/span>\u00a0<\/span>\ub3d9\uc885<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span><\/span><\/span><\/span><\/h6>
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3<\/span>\u00a0<\/span>m<\/span>\u00a0<\/span>\uc774\uc0c1\uc758<\/span>\u00a0<\/span>\uae38\uc774\ub97c<\/span>\u00a0<\/span>\uac16\ub294<\/span>\u00a0<\/span>Duo-\ud50c\ub77c\uc988\ub9c8\ub9b0<\/span>\u00a0<\/span>\uc8fc\uc704\uc5d0<\/span>\u00a0<\/span>\ucd95\ubc29\ud5a5\uc73c\ub85c<\/span>\u00a0<\/span>\uade0\uc9c8\ud55c<\/span>\u00a0<\/span>\uc800\uc555<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8\uc758<\/span>\u00a0<\/span>\ud615\uc131\uc740<\/span>\u00a0<\/span>\ub2e8\uc9c0<\/span>\u00a0<\/span>2.45<\/span>\u00a0<\/span>GHz<\/span>\u00a0<\/span>\ub9c8\uc774\ud06c\ub85c\ud30c<\/span>\u00a0<\/span>\uc804\ub825\uc758<\/span>\u00a0<\/span>\uc218<\/span>\u00a0<\/span>kW\ub97c<\/span>\u00a0<\/span>\uc0ac\uc6a9\ud558\ub294<\/span>\u00a0<\/span>\uc751\uc6a9\uc5d0<\/span>\u00a0<\/span>\ub300\ud574<\/span>\u00a0<\/span>\uc785\uc99d\ub418\uc5c8\ub2e4.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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4.\t\uace0\uc131\ub2a5 - Duo Plasmaline\uacfc Plasma Array\ub97c \uacb0\ud569\ud558\uc5ec \ub9e4\uc6b0 \ud6a8\uc728\uc801\uc778 \ud45c\uba74 \ucc98\ub9ac<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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2\ucc28\uc6d0 plasma array \uc18c\uc2a4\ub294 \ub450 \uac1c \uc774\uc0c1\uc758 \ubcd1\ub82c Duo-plasma line\uc744 \uac19\uc740 \uac70\ub9ac\uc5d0 \ubc30\uc5f4\ud560 \ub54c \uc0dd\uae41\ub2c8\ub2e4. Duo-plasma line\uc774 \ucd95\ubc29\ud5a5 \uade0\uc9c8 \ud50c\ub77c\uc988\ub9c8\ub97c \uc81c\uacf5\ud558\ub294 \ubc18\uba74, \ud50c\ub77c\uc988\ub9c8 \uc5b4\ub808\uc774\ub294 \ud06c\uace0 \uade0\uc9c8\ud55c \ud50c\ub77c\uc988\ub9c8\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c, Duo-plasma line\uc740 \uc5f0\uc18d\uc801\uc778 \uc778\ub77c\uc778 \uacf5\uc815\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8 \ud45c\uba74 \ucc98\ub9ac\uc5d0 \ubc14\ub78c\uc9c1\ud558\uac8c \uc0ac\uc6a9\ub418\ub294 \ubc18\uba74, Plasma Array\ub294 \uc5f0\uc18d \ubc0f \ubc30\uce58 \uacf5\uc815\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>

Duo-plasma line\uacfc plasma Array\ub294 \ube44\uc591\uc131 \ub9c8\uc774\ud06c\ub85c\ud30c \ud50c\ub77c\uc988\ub9c8\uc758 \ub0ae\uc740 \uc774\uc628 \uc5d0\ub108\uc9c0\uc5d0\uc11c \ub192\uc740 radical \ubc00\ub3c4\ub97c \uc720\uc9c0\ud558\uae30\uc5d0 \uc628\ub3c4\ubcc0\ud654\uc5d0 \ubbfc\uac10\ud55c \ubb3c\uc9c8\uc5d0\ub3c4 \ub9e4\uc6b0 \ud6a8\uc728\uc801\uc778 \ud45c\uba74 \ucc98\ub9ac\uac00 \uac00\ub2a5\ud558\uac8c \ud574\uc90d\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\uadf8\ub9bc<\/span>\u00a0<\/span>2:<\/span><\/span><\/span><\/span>\u00a0<\/span>\ub0ae\uc740<\/span>\u00a0<\/span>\uc555\ub825\uc5d0\uc11c<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\uc5b4\ub808\uc774<\/span>\u00a0<\/span>\ub9c8\uc774\ud06c\ub85c\ud30c<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\uc18c\uc2a4\uc5d0<\/span>\u00a0<\/span>\uc758\ud574<\/span>\u00a0<\/span>\ud615\uc131\ub41c<\/span>\u00a0<\/span>2\ucc28\uc6d0<\/span>\u00a0<\/span>\uade0\uc9c8<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>[2].<\/span><\/span><\/span><\/span><\/h6>
\u00a0<\/h6>
\u00a0<\/h6>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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5.\t\uc11c\ud53c\uc2a4 \uce58\uc218 \uc0ac\uc6a9\uc790 \uc815\uc758 - \ud50c\ub77c\uc988\ub9c8 \uc601\uc5ed\uc758 \ub108\ube44\uc640 \uae38\uc774 \ud655\uc7a5\uc131<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\uae30\uc900\ucc99\ub3c4 \uc124\uacc4 \ub355\ubd84\uc5d0 Plasma Array\ub294 plasma array\uc5d0\uc11c duo-plasma line\uc758 \uc218\uc640 \uae38\uc774\ub97c \uad6c\uc131\ud560 \ub54c \ubcf4\ub2e4 \uc27d\uac8c \uae30\uc9c8\uc758 \ucc28\uc6d0\uc5d0 \uc801\uc751\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud65c\uc131 \ud50c\ub77c\uc988\ub9c8 \uba74\uc801\uc740 \ud3ed\uacfc \uae38\uc774\ub85c \ud06c\uae30\ub97c \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\uadf8\ub9bc<\/span>\u00a0<\/span>3:<\/span><\/span><\/span><\/span>\u00a0<\/span>\ud45c\uba74\uc758<\/span>\u00a0<\/span>\uc800\uc555<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\ucc98\ub9ac\ub97c<\/span>\u00a0<\/span>\uc704\ud55c<\/span>\u00a0<\/span>4\uac1c\uc758<\/span>\u00a0<\/span>Duo-Plasmalins\ub85c<\/span>\u00a0<\/span>\uad6c\uc131\ub41c<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\uc5b4\ub808\uc774\uc758<\/span>\u00a0<\/span>\ubaa8\uc2dd\ub3c4(\ub179\uc0c9\uc73c\ub85c<\/span>\u00a0<\/span>\ud45c\uc2dc\ub428)<\/span><\/span><\/span><\/span><\/h6>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\uc800\uc555\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8 \ud45c\uba74 \ucc98\ub9ac\ub97c \uc9c4\ud589\ud558\ub294 \uacf5\uc815 \ucc54\ubc84\uc5d0\uc11c 4\uac1c\uc758 Duo-plasma lines\ub4e4\ub85c \uad6c\uc131\ub41c Plasma Array\uc758 Schematic \uc740 \uadf8\ub9bc3\uc5d0 \ub098\uc640\uc788\uc2b5\ub2c8\ub2e4.\u00a0 4\uac1c\uc758 Duo-plasma lines\ub4e4\uc740 \uc67c\ucabd\uacfc \uc624\ub978\ucabd\uc5d0\uc11c \ub9c8\uc774\ud06c\ub85c\ud30c \uc5d0\ub108\uc9c0\uac00 \uacf5\uae09\ub429\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c\ud30c \uc5d0\ub108\uc9c0\ub294 \uc591\ucabd\uc5d0 \uc788\ub294 \ub450\uac1c\uc758 Magnetron-head\uc5d0 \uc758\ud574 \uc0dd\uc131\ub429\ub2c8\ub2e4. \uac01 Magnetron-head\ub294 power splitter\ub97c \ud1b5\ud574 \ub450\uac1c\uc758 duo-plasma lines\uc5d0 \ub9c8\uc774\ud06c\ub85c\ud30c \uc5d0\ub108\uc9c0\ub97c \uacf5\uae09\ud569\ub2c8\ub2e4. \uadf8\ub9bc4\ub294 6\uac1c\uc758 Duo-plasma line\uc744 \ud3ec\ud568\ud55c plasma array\uc774\uba70 \uae38\uc774\ub294 160cm\uc785\ub2c8\ub2e4.<\/p>

\ub530\ub77c\uc11c Silicon-Nitride\ub85c \ud0dc\uc591 \uc804\uc9c0\ub97c \ucf54\ud305\ud558\uae30 \uc704\ud574 150cm x 200cm\uc758 plasma \ud65c\uc131 \uc601\uc5ed\uc744 \ud615\uc131\ud569\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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\uadf8\ub9bc<\/span>\u00a0<\/span>4:<\/span><\/span><\/span><\/span>\u00a0<\/span>6\uac1c\uc758<\/span>\u00a0<\/span>Duo-Plasmalins\ub85c<\/span>\u00a0<\/span>\uad6c\uc131\ub41c<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\uc5b4\ub808\uc774(Plasma<\/span>\u00a0<\/span>Array)\ub294<\/span>\u00a0<\/span>\uc608\ub97c<\/span>\u00a0<\/span>\ub4e4\uc5b4<\/span>\u00a0<\/span>\ud0dc\uc591<\/span>\u00a0<\/span>\uc804\uc9c0\uc758<\/span>\u00a0<\/span>\uc0dd\uc0b0\uc5d0<\/span>\u00a0<\/span>\uc0ac\uc6a9\ub418\ub294<\/span>\u00a0<\/span>\ubc15\ub9c9\uc758<\/span>\u00a0<\/span>\uc800\uc555<\/span>\u00a0<\/span>\ud50c\ub77c\uc988\ub9c8<\/span>\u00a0<\/span>\uc99d\ucc29(Low-pressure<\/span>\u00a0<\/span>plasma<\/span>\u00a0<\/span>deposition)\uc744<\/span>\u00a0<\/span>\uc704\ud574<\/span>\u00a0<\/span>\uacf5\uc815<\/span>\u00a0<\/span>\ucc54\ubc84\uc5d0<\/span>\u00a0<\/span>\ud1b5\ud569\ub41c\ub2e4(Meyer<\/span>\u00a0<\/span>Burger<\/span>\u00a0<\/span>Germany\uc758<\/span>\u00a0<\/span>\uc81c\uacf5)<\/span><\/span><\/span><\/span><\/h6>
\u00a0<\/h6>
\u00a0<\/h6>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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6.\t\ud601\uc2e0\uc801\uc778 \uc5b4\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \uac1c\ubc29\ud615 \uac00\ub2a5\uc131 - Duo-Plasmalines \ubc0f \ud50c\ub77c\uc988\ub9c8 \uc5b4\ub808\uc774<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\ubc15\ub9c9\uc758 \uc99d\ucc29 \uc678\uc5d0\ub3c4, Muegge\uc758 Duo-plasma line\uacfc plasma arrays \uc18c\uc2a4\ub294 \ud45c\uba74 \ud65c\uc131\ud654, \uc2dd\uac01, \uc138\ucc99 \ubc0f \uba78\uade0\uacfc \uac19\uc740 \ud50c\ub77c\uc988\ub9c8 \ubcf4\uc870 \ud45c\uba74 \ucc98\ub9ac\uc5d0\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ud604\uc7ac \uadf8\ub9ac\uace0 \ubbf8\ub798\uc5d0\ub3c4 \uc774 \ud765\ubbf8\ub85c\uc6b4 \uae30\uc220\uc740 \uc9c0\uc18d \uac00\ub2a5\ud55c \uc5d0\ub108\uc9c0 \uc0dd\uc0b0 \ubc0f \uc800\uc7a5\uc744 \uc704\ud55c \uad11\ubc94\uc704\ud558\uace0 \ud601\uc2e0\uc801\uc778 \ud504\ub85c\uc138\uc2a4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>

\uc800\uc555\uc5d0\uc11c\uc758 \ube44\ud3c9\ud615 \ub9c8\uc774\ud06c\ub85c\ud30c \ud50c\ub77c\uc988\ub9c8 \uacf5\uc815\uc5d0 \ub300\ud55c \uc608\uc2dc\ub4e4\ub85c\ub294 \uc2e0\uaddc \ub9ac\ud2ac\uc774\uc628, \ubc30\ud130\ub9ac\uc6a9 \uc2e4\ub9ac\ucf58 \ub098\ub178\uc640\uc774\uc5b4\uc758 \uc99d\ucc29, \uae00\uace0 \uc5f0\ub8cc\uc804\uc9c0 \uae30\uc220\uc5d0\uc11c\uc758 \ud45c\uba74 \uac1c\uc870\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>

\ub2f9\uc0ac\uc758 \uc6f9 \uc0ac\uc774\ud2b8\ub97c \ubc29\ubb38\ud558\uc5ec Duo-plasma line \ubc0f plasma array\uc758 \uc2e4\uc81c \uc0ac\uc6a9 \uc0ac\ub840\ub97c \ud655\uc778\ud558\uace0 \uc774\ub7ec\ud55c \uc0ac\ub840\ub97c \uc0ac\uc6a9\ud558\uc5ec \uadc0\uc0ac\uc758 \uc81c\ud488 \ubc0f \uac1c\ubc1c\uc744 \ub3c4\uc6c0 \uc904 \uc218 \uc788\ub294\uc9c0 \ud655\uc778\ud574\ubcf4\uc138\uc694.


<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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\ucc38\uc870<\/p>

[1]\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 A. Schulz, P. B\u00fcchele, E. Ramisch, O. Janzen, F. Jimenez, C. Kamm, J. Kopecki, M. Leins, S. Merli, H. Petto, F. R. Mendez, J. Schneider, U. Schumacher, M. Walker, U. Stroth, Contrib. <\/em>Plasma Phys.<\/em>, 2012, 52<\/strong>, 607-614.<\/p>

[2]\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 M. Walker, A. Schulz: Duo-Plasmaline. [online] Homepage: University of Stuttgart, Institute of Interfacial Process Engineering and Plasma Technology (IGVP)<\/p>

URL: https:\/\/www.igvp.uni-stuttgart.de\/en\/research\/plasma-technology\/sources\/plasmaline\/<\/a> [status: June 16, 2021].<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

DUO-PLASMALINE\u00a0\uc2dc\uc2a4\ud15c\uc774\u00a0\uc9c0\uc18d\u00a0\uac00\ub2a5\ud55c\u00a0\uc5d0\ub108\uc9c0\u00a0\uc5b4\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\u00a0\uc5b4\ub5bb\uac8c\u00a0\uc804\ub825\uc744\u00a0\uacf5\uae09\ud558\ub294\uc9c0 \ubaa8\ub450\ub294 \uac74\uac15\ud55c \ud589\uc131\uc5d0\uc11c \uc0b4\uae38 \uc6d0\ud569\ub2c8\ub2e4! \ubaa8\ub4e0 \uc0b0\uc5c5\uc758 \ud601\uc2e0\uac00\ub4e4\uc740 \ub354 \uae68\ub057\ud55c \ubbf8\ub798\ub97c \uc704\ud574 \uc5f4\uc2ec\ud788 \ub178\ub825\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubb34\ubc30\ucd9c \uc790\ub3d9\ucc28 \ubc30\ud130\ub9ac\uc640 flexible \ud0dc\uc591\uad11 \ubc1c\uc804 \ud328\ub110 \uc81c\uc870 \uad00\ub828 \uae30\uc220\uc744 \ud3ec\ud568\ud55c \uadf8\ub9b0\uc5d0\ub108\uc9c0\uc758 \ud6a8\uc728\uc131, \ud488\uc9c8 \ubc0f \ud655\uc7a5\uc131\uc740 \ub9ce\uc740 \ubc1c\uc804 \uac00\ub2a5\uc131\uc774 \uc788\uc2b5\ub2c8\ub2e4. Muegge\uc758 duo-plasma line \uc2dc\uc2a4\ud15c\uc740 \uac1c\ubc1c\uc790\ub4e4\uc774 \ud45c\uba74 \ucc98\ub9ac, \uc5d0\ub108\uc9c0 \uc0dd\uc0b0 \ubc0f \uc800\uc7a5 \ubd84\uc57c\uc5d0\uc11c \uc801\uadf9\uc801\uc73c\ub85c \uc218\uc815, \ubc0f \uac1c\ubc1c\ud560 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4. 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