Muegge Products
470 x 470 (18.50 x 18.50)
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Stripping-Tool
Item number: MA3000D-201BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
Stripping-Tool
Item number: MA3000D-221BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors5Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
Stripping-Tool
Item number: MA3000D-251BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
Stripping-Tool
Item number: MA3000D-271BB
Type of toolHigh Volume Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
Stripping-Tool
Item number: MA3000D-291BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50) -
Stripping-Tool
Item number: MA3000D-301BB
Type of toolHigh Volume Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors5Chamber size [mm (inch)]470 x 470 (18.50 x 18.50)