Muegge Products

Plasma area 797,5 mm x 150 mm

Plasma area 797,5 mm x 150 mm
  • Plasma array (large area)

    Item number: MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

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