Muegge Products
R&D / Pilot Production Tool
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Decapsulation-Tool
Item number: MA1250D-114BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA0000D-001BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-110BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-112BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-115BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-117BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]400Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-118BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2N2Process gas 3CF4Process gas 4N2Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65)