Muegge Products

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  • Atmospheric-Plasma-Source

    Item number: MA075KA-019BF

    Process
    Gas- /Material Transformation
    Output Connection Type
    others
    Dielectric material
    Quartz
    Output Power CW [W]
    75000
    Frequency [MHz]
    915
    Waveguide size
    WR975 / R9
    Reactor outlet
    outer ø131 mm. inner ø80 mm
    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA1250C-003BC

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    1250
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-083BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-123BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-133BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-143BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Sapphire
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-223BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details
  • Radical plasma source (Remote Plasma Source)

    Item number: MA2000C-233BB

    Process
    Etching & Deposition
    Output Connection Type
    Dielectric material
    Ceramics
    Mains voltage nominal [V]
    230 / 208
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450

    Radikalquelle (Remote-Plasma-Quelle)

    More details