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2450 (4)
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– (4)
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Plasma array (large area) (4)
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Plasma area 320 mm x 320 mm (1)
Plasma area 520 mm x 340 mm (1)
Plasma area 700 mm x 226 mm (1)
Plasma area 797,5 mm x 150 mm (1)
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Ceramics (4)
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Etching & Deposition (4)
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2x 3000 (3)
2000 (1)
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Coaxial (1)
4 Products in
Double
  • Plasma array (large area)

    Item number: MA4000Y-153BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 320 mm x 320 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
  • Plasma array (large area)

    Item number: MA6000Y-013BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 700 mm x 226 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
  • Plasma array (large area)

    Item number: MA6000Y-023BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 797,5 mm x 150 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details
  • Plasma array (large area)

    Item number: MA6000Y-033BC

    Process
    Etching & Deposition
    Output Connection Type
    Plasma area 520 mm x 340 mm
    Dielectric material
    Ceramics
    Output Power CW [W]
    2x 3000
    Frequency [MHz]
    2450
    Gas manifold
    Double

    Flächenplasmaquelle

    More details