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Many industries are discovering microwave and plasma technology for themselves - in order to accelerate processes, to make them more precise and more energy-efficient. As the world's leading manufacturer, our experts are at the source of developments. Go deeper into the subject matter of the energy solutions of the future in the MUEGGE blog.

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Lab-Grown-Diamonds / MEMS / Semi-Conductor Removal of Black Carbon and Organic Residues

Rework and Removal of C-based Materials – A challenge not only for semiconductor manufacturer The deposition of carbon-based materials plays a major role in semiconductor …

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Automotive / Lab-Grown-Diamonds / MEMS / Microwave-Technology / Semi-Conductor Reflected Power in Microwave (-Plasma) Processes

The reflected power is defined as the portion of the generated microwave power that is not coupled into the process and that returns back to …

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Automotive / MEMS / Microwave-Technology / Semi-Conductor 3D-Simulation: Slim Down Your Component Development Process

While developing thermoprocessing equipment, testing of prototypes and numerous repetitions cost plenty oftime and resources. 3D simulation capabilities allow you to speed up your prototyping …

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MEMS / Semi-Conductor Photoresist Removal after High Dose Implant (HDIS)

High Dose Implant Strip (HDIS) – Challengeable process in semiconductor manufacturing Photoresist strip after high dose implant strip remains one of the most demanding processes …

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MEMS / Semi-Conductor Endpoint Control for Thick Photoresist Removal

Complete removal of thick photoresist needs proper endpoint detection Applying microwave (MW) plasma to remove thick resist such as used for micro-machinery and microelectromechanical systems …

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MEMS / Semi-Conductor Quality Improvement in Micromachinery and MEMS

Removal of thick and embedded photoresist – A case for isotropic microwave plasma Microwave plasma is the perfect solution for removing thick resist such as …

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Progress is in the details. Find out about current findings and progressive application developments in microwave and plasma technology - directly from our experts, tailored to your process optimization.

Impulses from experts

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