Muegge Products
Sapphire
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-143BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-823BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-833BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-863BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-873BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-903BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-913BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA3000C-403BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power CW [W]3000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)