Muegge Products

400

400
  • Decapsulation-Tool

    Item number: MA3000D-211BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-241BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-281BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-311BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Power-Supply

    Item number: MP010KG-113TS

    Frequency [MHz]
    2450
    Output Power CW [W]
    2x 3000
    Line connection
    3~ (L1 / L2 / L3 / N / PE)
    Control circuit connection [V]
    –
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    –
    Line Frequency [Hz]
    50
    Cooling
    air
    Pulse output power max [W]
    2x 10000
    Front-Panel (HMI)
    No Front-Panel, No Front-Panel
    Interface
    Profinet
    Interface 2
    –
    Interface 3
    –
    Interface 4
    –
    Interface 5
    –
    Width [mm (inch)]
    606 (23,86)
    Height [mm (inch)]
    2062 (81,18)
    Depth [mm (inch)]
    881 (34,69)
    Protection Class
    IP00
    Isolator
    No
    Power-Supply
    High-Pulse
    More details
  • Power-Supply

    Item number: MS075KE-511DL

    Frequency [MHz]
    915
    Output Power CW [W]
    75000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    –
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    –
    Line Frequency [Hz]
    50
    Cooling
    Air-water heat exchanger
    Pulse output power max [W]
    –
    Front-Panel (HMI)
    No Front-Panel
    Interface
    Can-Bus
    Interface 2
    –
    Interface 3
    –
    Interface 4
    –
    Interface 5
    –
    Width [mm (inch)]
    1200 (47,24)
    Height [mm (inch)]
    2250 (88,58)
    Depth [mm (inch)]
    1050 (41,84)
    Protection Class
    IP40
    Isolator
    No
    Power-Supply
    Linear
    More details
  • Power-Supply

    Item number: MX3000D-171KN

    Frequency [MHz]
    2450
    Output Power CW [W]
    3000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water, Air / Water
    Pulse output power max [W]
    6000
    Front-Panel (HMI)
    Operating Unit with Main Switch, Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    EtherNet/IP
    Interface 5
    –
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection Class
    IP20
    Isolator
    No
    Related Magnetron Head
    MH3000S-250BF, MH3000S-251BF, MH3000S-252BF
    Power-Supply
    Switch-Mode
    More details
  • Power-Supply, Switch-Mode

    Item number: MX6000D-154KX

    Frequency [MHz]
    2450
    Output Power CW [W]
    6000
    Line connection
    3~ (L1 / L2 / L3 / PE)
    Control circuit connection [V]
    Line Voltage [V]
    400
    Mains voltage control circuit [V]
    Line Frequency [Hz]
    50 / 60
    Cooling
    Air / Water, Air / Water
    Pulse output power max [W]
    –
    Front-Panel (HMI)
    Operating Unit with Main Switch, Operating Unit with Main Switch
    Interface
    front display
    Interface 2
    Can-Bus
    Interface 3
    A/D
    Interface 4
    Modbus TCP
    Interface 5
    –
    Width [mm (inch)]
    484 (19,06)
    Height [mm (inch)]
    128 (5,04)
    Depth [mm (inch)]
    607 (23,90)
    Protection Class
    IP20
    Isolator
    No
    Related Magnetron Head
    MH6000S-250BF, MH6000S-251BF
    Power-Supply
    Switch-Mode
    More details