Muegge Products

N2

N2
  • Decapsulation-Tool

    Item number: MA1250D-114BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-211BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-311BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Stripping-Tool

    Item number: MA0000D-001BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-110BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-112BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-115BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA3000D-201BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    O2
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    9
    Chamber size [mm (inch)]
    470 x 470 (18.50 x 18.50)
    More details