Muegge Products
N2
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Stripping-Tool (10)
Decapsulation-Tool (3)
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High Volume Production Tool (8)
R&D / Pilot Production Tool (5)
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470 x 470 (18.50 x 18.50) (6)
245 x 245 (9.65 x 9.65) (5)
320 x 320 (12.60 x 12.60) (2)
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400 (7)
208 (3)
480 (3)
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13 Products in
N2-
Decapsulation-Tool
Item number: MA1250D-114BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Decapsulation-Tool
Item number: MA3000D-211BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4CF4Process gas 5SF6Process gas 6ArProduct Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-311BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4ArProcess gas 5CF4Process gas 6SF6Product Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Stripping-Tool
Item number: MA0000D-001BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-110BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-112BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA1250D-115BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]208Process gas 1O2Process gas 2N2Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors2Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Stripping-Tool
Item number: MA3000D-201BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4O2Process gas 5–Process gas 6–Product Temperature sensors9Chamber size [mm (inch)]470 x 470 (18.50 x 18.50)