Muegge Products

CF4

CF4
  • Decapsulation-Tool

    Item number: MA3000D-211BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details