Muegge Products
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Decapsulation-Tool
Item number: MA1250D-114BB
Type of toolR&D / Pilot Production ToolLine Voltage [V]480Process gas 1O2Process gas 2CF4Process gas 3N2Process gas 4–Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]245 x 245 (9.65 x 9.65) -
Decapsulation-Tool
Item number: MA3000D-211BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4CF4Process gas 5SF6Process gas 6ArProduct Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-241BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3CF4Process gas 4N2H2Process gas 5SF6Process gas 6N2Product Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-281BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2N2H2Process gas 3CF4Process gas 4N2Process gas 5–Process gas 6–Product Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60) -
Decapsulation-Tool
Item number: MA3000D-311BB
Type of toolHigh Volume Production ToolLine Voltage [V]400Process gas 1O2Process gas 2O2Process gas 3N2Process gas 4ArProcess gas 5CF4Process gas 6SF6Product Temperature sensors–Chamber size [mm (inch)]320 x 320 (12.60 x 12.60)