{"id":3831,"count":49,"description":"<h2>PLASMA COMPONENTS<\/h2>\r\nSemiconductor technology has changed our view of the world - but plasma processing has made it possible to produce products for everyone. High-density microwave-assisted plasma sources perform superiorly in etching and deposition systems that require high etching rates without electrical charging or damage to the material.\r\n\r\n.\r\n\r\nOur leading role as a manufacturer of plasma components helps you to develop and adapt your systems - while ensuring fast market entry and low CoO. As part of our \"\"turnkey\"\" product range, we offer plasma components for a variety of different production tools and applications:\r\n\r\n.\r\n<ul>\r\n \t<li style=\"list-style-type: none\">\r\n<ul>\r\n \t<li>High density deposition of oxide and nitride layers<\/li>\r\n<\/ul>\r\n<\/li>\r\n<\/ul>\r\n&nbsp;\r\n<ul>\r\n \t<li>SU-8 distance<\/li>\r\n \t<li>Highly selective removal of organic materials<\/li>\r\n \t<li>Non-oxidizing chemistry for cleaning of oxygen sensitive materials<\/li>\r\n \t<li>Damage-free cleaning of sensitive surfaces (e.g. sensors) and 3D structures<\/li>\r\n \t<li>Isotropic chamber cleaning<\/li>\r\n \t<li>LIGA process (lithography, electroplating and shaping)<\/li>\r\n<\/ul>\r\n&nbsp;","link":"https:\/\/muegge-group.com\/us\/product-category\/plasma-components-us\/","name":"Plasma components","slug":"plasma-components-us","taxonomy":"product_cat","parent":0,"meta":[],"menu_order":3,"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Plasma components Archive - Muegge<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/muegge-group.com\/us\/product-category\/plasma-components-us\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Plasma components Archive - Muegge\" \/>\n<meta property=\"og:description\" content=\"PLASMA COMPONENTS Semiconductor technology has changed our view of the world &#8211; but plasma processing has made it possible to produce products for everyone. High-density microwave-assisted plasma sources perform superiorly in etching and deposition systems that require high etching rates without electrical charging or damage to the material. . Our leading role as a manufacturer of plasma components helps you to develop and adapt your systems &#8211; while ensuring fast market entry and low CoO. As part of our &#8220;&#8221;turnkey&#8221;&#8221; product range, we offer plasma components for a variety of different production tools and applications: .  High density deposition of oxide and nitride layers  &nbsp; SU-8 distance Highly selective removal of organic materials Non-oxidizing chemistry for cleaning of oxygen sensitive materials Damage-free cleaning of sensitive surfaces (e.g. sensors) and 3D structures Isotropic chamber cleaning LIGA process (lithography, electroplating and shaping) &nbsp;\" \/>\n<meta property=\"og:url\" content=\"https:\/\/muegge-group.com\/us\/product-category\/plasma-components-us\/\" \/>\n<meta property=\"og:site_name\" content=\"Muegge\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"CollectionPage\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/us\\\/product-category\\\/plasma-components-us\\\/\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/us\\\/product-category\\\/plasma-components-us\\\/\",\"name\":\"Plasma components Archive - Muegge\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#website\"},\"inLanguage\":\"en-US\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#website\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/\",\"name\":\"MUEGGE\",\"description\":\"Ihr Partner f\u00fcr industrielle Mikrowellen\u00ad und Plasmasysteme\",\"publisher\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#organization\",\"name\":\"MUEGGE Group\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/wp-content\\\/uploads\\\/2021\\\/05\\\/muegge-logo.svg\",\"contentUrl\":\"https:\\\/\\\/muegge-group.com\\\/wp-content\\\/uploads\\\/2021\\\/05\\\/muegge-logo.svg\",\"width\":140,\"height\":46,\"caption\":\"MUEGGE Group\"},\"image\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/de.linkedin.com\\\/company\\\/muegge\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Plasma components Archive - Muegge","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/muegge-group.com\/us\/product-category\/plasma-components-us\/","og_locale":"en_US","og_type":"article","og_title":"Plasma components Archive - Muegge","og_description":"PLASMA COMPONENTS Semiconductor technology has changed our view of the world &#8211; but plasma processing has made it possible to produce products for everyone. High-density microwave-assisted plasma sources perform superiorly in etching and deposition systems that require high etching rates without electrical charging or damage to the material. . Our leading role as a manufacturer of plasma components helps you to develop and adapt your systems &#8211; while ensuring fast market entry and low CoO. As part of our &#8220;&#8221;turnkey&#8221;&#8221; product range, we offer plasma components for a variety of different production tools and applications: .  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