{"id":6937,"date":"2019-12-05T11:21:42","date_gmt":"2019-12-05T10:21:42","guid":{"rendered":"https:\/\/stage.muegge.de\/photoresist-removal-after-high-dose-implant-hdis\/"},"modified":"2020-08-05T16:15:06","modified_gmt":"2020-08-05T14:15:06","slug":"%e9%ab%98%e5%89%82%e9%87%8f%e6%a4%8d%e5%85%a5%ef%bc%88hdis%ef%bc%89%e5%90%8e%e9%99%a4%e8%83%b6","status":"publish","type":"post","link":"https:\/\/muegge-group.com\/zh-hans\/%e9%ab%98%e5%89%82%e9%87%8f%e6%a4%8d%e5%85%a5%ef%bc%88hdis%ef%bc%89%e5%90%8e%e9%99%a4%e8%83%b6\/","title":{"rendered":"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6"},"content":{"rendered":"\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t

\u9ad8\u5242\u91cf\u690d\u5165\u9664\u80f6\uff08HDIS\uff09<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t\t\t

\u9ad8\u5242\u91cf\u690d\u5165\u540e\u7684\u5149\u523b\u80f6\u53bb\u9664\uff0c\u4ecd\u662f\u534a\u5bfc\u4f53\u5de5\u4e1a\u6700\u82db\u523b\u7684\u5de5\u827a\u4e4b\u4e00\u3002 \u9762\u4e34\u7684\u6311\u6218\u662f\u5728\u4e0d\u70e7\u5916\u58f3\u7684\u60c5\u51b5\u4e0b\u53bb\u9664\u5916\u58f3\uff08\u6216\u5728\u690d\u5165\u8fc7\u7a0b\u4e2d\u5f62\u6210\u7684\u786c\u5316\u5c42\uff09\u548c\u67d4\u8f6f\u7684\u5149\u523b\u80f6\u6574\u4f53\uff0c\u5e76\u7559\u4e0b\u5f88\u96be\u6e05\u9664\u7684\u78b3\u5316\u6b8b\u7559\u7269\u3002 \u80fd\u5728\u4f4e\u6e29\u4e0b\uff0c\u63a7\u5236\u786c\u5316\u6709\u673a\u6750\u6599\u548c\u672a\u63a5\u89e6\u5149\u523b\u80f6\u7684\u53bb\u9664\uff0c\u662f\u6e05\u6d01\u7684\u5173\u952e\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

\n\t\t\t\t
\n\t\t\t\t\t

\u5fae\u6ce2\u7b49\u79bb\u5b50\u4f53\u2013\u6700\u5c0f\u70ed\u8d1f\u8377\uff0c\u5404\u5411\u540c\u6027\u7684\u6297\u8680\u5242\u53bb\u9664<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t\t\t

\u7531\u4e8eRF<\/span>\u7b49\u79bb\u5b50\u4f53\u7684\u6027\u8d28\uff0c\u5b83\u5c06\u57fa\u677f\u66b4\u9732\u4e8e\u76f8\u5bf9\u591a\u7684\u5e26\u7535\u7269\u8d28\uff08\u79bb\u5b50\uff09\u4e2d\u3002\u8fd9\u4e9b\u79bb\u5b50\u5728\u649e\u51fb\u8868\u9762\u65f6\u4f1a\u4f20\u9012\u52a8\u80fd\uff0c\u5bfc\u81f4\u57fa\u677f\u52a0\u70ed\u3002\u9ad8\u6e29\u5bf9\u540e\u9ad8\u5242\u91cf\u690d\u5165\u7269\u975e\u5e38\u4e0d\u5229\uff0c\u56e0\u4e3a\u5b83\u5c06\u4f7f\u5149\u523b\u80f6\u76ae\u8fdb\u4e00\u6b65\u70d8\u70e4\u548c\u786c\u5316\u3002\u51b7\u5374\u57fa\u677f\u6709\u52a9\u4e8e\u9632\u6b62\u57fa\u677f\u7684\u6574\u4f53\u52a0\u70ed\uff0c\u4f46\u662f\u4e0d\u80fd\u907f\u514d\u5b9e\u9645\u53d1\u751f\u53cd\u5e94\u7684\u8868\u9762\u7684\u5c40\u90e8\u52a0\u70ed\u3002\u56e0\u6b64\uff0c\u5373\u4f7f\u5e73\u5747\u6e29\u5ea6\u8f83\u4f4e\uff0c\u5c40\u90e8\u6e29\u5ea6\u4ecd\u8f83\u9ad8\uff0c\u56e0\u4e3a\u51b7\u5374\u5bf9\u57fa\u7840\u53cd\u5e94\uff08\u79bb\u5b50\u6e85\u5c04\uff09\u4e0d\u8d77\u4f5c\u7528\u3002\u91c7\u7528Muegge<\/span>\u7684\u5fae\u6ce2\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u7cfb\u7edf\uff0c\u80fd\u91cf\u4f20\u9012\u975e\u5e38\u4f4e\uff0c\u6ca1\u6709\u5f62\u6210\u5e26\u7535\u7c92\u5b50\u91ca\u653e\u5230\u5de5\u827a\u8154\u4e2d\u3002\u7ed3\u679c\uff0c\u57fa\u677f\u4fdd\u6301\u51b7\u6001\uff0c\u552f\u4e00\u7684\u70ed\u6e90\u662f\u53bb\u9664\u5149\u523b\u80f6\u7684\u5316\u5b66\u53cd\u5e94\u653e\u70ed\u3002\u7531\u4e8e\u53cd\u5e94\u70ed\u662f\u5149\u523b\u80f6\u53bb\u9664\u5de5\u827a\u7684\u76f4\u63a5\u7ed3\u679c\uff0c\u56e0\u6b64\u53ef\u901a\u8fc7\u5de5\u827a\u6761\u4ef6\u8f7b\u677e\u63a7\u5236\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

\n\t\t\t\t\t\t
\n\t\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t
\n\t\t\t
<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t

Muegge\u7684\u89e3\u51b3\u65b9\u6848\uff1a\u51c6\u786e\u3001\u53ef\u9760\u3001\u53ef\u91cd\u590d<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t\t\t

\u5fae\u6ce2\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u6709\u6548\u5730\u5229\u7528\u80fd\u91cf\uff0c\u4ea7\u751f\u79f0\u4e3a\u81ea\u7531\u57fa\u7684\u9ad8\u53cd\u5e94\u6027\u4e2d\u6027\u7c92\u5b50\u3002 \u4e0d\u4ea7\u751f\u4f7f\u57fa\u677f\u52a0\u70ed\u7684\u4f5c\u4e3a\u52a8\u80fd\u8f7d\u4f53\u7684\u79bb\u5b50\u3002 \u56e0\u6b64\uff0cMW<\/span>\u8f85\u52a9\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u7cfb\u7edf\u975e\u5e38\u9002\u5408\u6e29\u63a7\u8981\u6c42\u4e25\u683c\u7684\u9ad8\u5242\u91cf\u690d\u5165\u540e\u7684\u9664\u80f6\u2013<\/span>\u4e0d\u4f1a\u53d1\u751f\u989d\u5916\u7684\u805a\u5408\u6216\u78b3\u5316\uff0c\u690d\u5165\u7684\u5149\u523b\u80f6\u53ef\u987a\u5229\u53bb\u9664\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

\n\t\t\t\t\t\t
\n\t\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t
\n\t\t\t
\n\t\t\t\t\t\t
\n\t\t\t\t
\n\t\t\t\t\t\t\t\t\t

  • MW<\/span>\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u4e2d\u91ca\u653e\u7684\u81ea\u7531\u57fa\uff0c\u53ef\u786e\u4fdd\u5bf9\u7834\u574f\u7684\u5149\u523b\u80f6\u8fdb\u884c\u5e73\u6ed1\u3001\u7eaf\u7cb9\u7684\u5316\u5b66\u53bb\u9664\u3002 \u7ed3\u679c\uff0c\u70ed\u8d1f\u8377\u6781\u4f4e\uff0c\u4fdd\u8bc1\u4e86\u5404\u5411\u540c\u6027\u53bb\u9664\u5149\u523b\u80f6\uff0c\u800c\u4e0d\u4f1a\u8fdb\u4e00\u6b65\u78b3\u5316\u7834\u574f\u7684\u5149\u523b\u80f6\u3002<\/p><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

    \n\t\t\t\t
    \n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t\t
    \n\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t
    \n\t\t\t\t\t

    MW\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u53ef\u5b9e\u73b0\u4f4e\u6e29\u4e0b\u7684\u7075\u6d3b\u5de5\u827a\u63a7\u5236<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t\t
    \n\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t
    \n\t\t\t\t\t\t\t\t\t\t\t\t
    \n\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t
    \u56fe1\uff1a\u5fae\u6ce2\u529f\u7387\u4e3aPMW = 2000W\uff0c\u5de5\u827a\u8868\u9762\u6e29\u5ea6\u968f\u65f6\u95f4\u5347\u9ad8\u548c\u964d\u4f4e<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t
    \n\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t
    \n\t\t\t\t\t\t\t\t\t\t\t\t
    \n\t\t\t\t\t\t\t\t\t\t\"\"\t\t\t\t\t\t\t\t\t\t\t
    \u56fe2\uff1a\u5fae\u6ce2\u529f\u7387PMW = 3000W\u6052\u5b9a\uff0c\u6837\u54c1\u6e29\u5ea6T = 150\u00b0C\uff0c\u52a0\u70ed\u677f\u5173\u95ed\uff0c\u4f7f\u7528\u6216\u4e0d\u4f7f\u7528CF4\u65f6\uff0c\u6807\u51c6PR\u7684\u5e73\u5747\u76f8\u5bf9\u8680\u523b\u901f\u7387<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t\t
    \n\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t
    \n\t\t\t\t\t\t\t\t\t

    \u4ec5\u6709\u81ea\u7531\u57fa\u5f62\u6210\uff0c\u4e0e\u7b49\u79bb\u5b50\u8154\u4f53\u7684\u5185\u8868\u9762\u7684\u76f8\u4e92\u4f5c\u7528\u5f88\u5c0f\u751a\u81f3\u6ca1\u6709\uff0c\u6e29\u5ea6\u4ecd\u7136\u5f88\u4f4e\uff08\u56fe1<\/span>\uff09\u3002 \u53ef\u4ee5\u9488\u5bf9\u53bb\u80f6\u5de5\u827a\u7684\u4e09\u4e2a\u6b65\u9aa4\u5bf9\u7eaf\u5316\u5b66HDIS<\/span>\u5de5\u827a\u8fdb\u884c\u5fae\u8c03\uff1a<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

    \n\t\t\t\t\t\t
    \n\t\t\t\t\t
    \n\t\t\t
    \n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t
    \n\t\t\t
    \n\t\t\t\t\t\t
    \n\t\t\t\t
    \n\t\t\t\t\t\t\t
      \n\t\t\t\t\t\t\t
    • \n\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\u5916\u58f3\u53bb\u9664<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t
    • \n\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\u6574\u4f53\u7070\u5316<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t
    • \n\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\u8fc7\u5ea6\u7070\u5316<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
      \n\t\t\t\t
      \n\t\t\t\t\t\t\t\t\t

      \u81ea\u7531\u57fa\u5bf9\u9ad8\u5242\u91cf\u690d\u5165\u540e\u9664\u80f6\u7684\u4f18\u52bf<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

      \n\t\t\t\t\t\t
      \n\t\t\t\t\t
      \n\t\t\t
      \n\t\t\t\t\t\t
      \n\t\t\t\t
      \n\t\t\t\t\t

      \u81ea\u7531\u57fa\u5bf9\u9ad8\u5242\u91cf\u690d\u5165\u540e\u9664\u80f6\u7684\u4f18\u52bf<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
      \n\t\t\t\t
      \n\t\t\t\t\t\t\t\t\t

      \u9ad8\u5242\u91cf\u690d\u5165\u9664\u80f6\u7684\u4e09\u4e2a\u6b65\u9aa4\u9700\u8981\u9002\u5f53\u7684\u7075\u6d3b\u6027\uff0c\u4ee5\u6ee1\u8db3\u6bcf\u4e2a\u6b65\u9aa4\u7684\u4e0d\u540c\u9700\u6c42\uff08\u56fe2<\/span>\uff09\u3002 \u5fae\u6ce2\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u53ef\u4ee5\u5207\u5f00\u786c\u76ae\uff0c\u79fb\u9664\u5927\u5757\u7684\u5149\u523b\u80f6\u800c\u4e0d\u4f1a\u8d77\u6ce1\u6216\u71c3\u70e7\uff0c\u5e76\u4e14\u53ef\u4ee5\u5728\u8fc7\u5ea6\u7070\u5316\u4e2d\u4ee5\u8f83\u9ad8\u7684\u9009\u62e9\u6027\u67d4\u548c\u5730\u9664\u53bb\u6b8b\u7559\u7269\u3002 \u7531\u4e8e\u7269\u7406\u7279\u6027\uff0cMW<\/span>\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u4e13\u95e8\u8bbe\u8ba1\u7528\u4e8e\u5feb\u901f\u4f46\u5e73\u6ed1\u7684\u7070\u5316\uff0c\u800c\u4e0d\u4f1a\u4fb5\u8680\u654f\u611f\u533a\u57df\u3002 \u7b49\u79bb\u5b50\u4f53\u4e2d\u4ea7\u751f\u7684\u81ea\u7531\u57fa\u4ec5\u5728\u8868\u9762\u5f15\u53d1\u5316\u5b66\u53cd\u5e94\u3002\u5728\u57fa\u6750\u5c42\u9762\u6ca1\u6709\u80fd\u6d4b\u91cf\u5230\u7684\u7535\u573a\u548c\u79bb\u5b50\uff0c\u56e0\u6b64\u4e0d\u4f1a\u53d1\u751f\u7b49\u79bb\u5b50\u4f53\u5bf9\u5173\u952e\u7ed3\u6784\u7684\u5145\u7535\u635f\u4f24\u3002 MW<\/span>\u8f85\u52a9\u7b49\u79bb\u5b50\u4f53\u975e\u5e38\u7b26\u5408\u73af\u4fdd\u8981\u6c42\uff0c\u56e0\u4e3a\u5de5\u827a\u6c14\u4f53\uff08\u5982CF4<\/span>\uff09\u51e0\u4e4e\u5b8c\u5168\u5206\u89e3\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

      \n\t\t\t\t\t\t
      \n\t\t\t\t\t
      \n\t\t\t
      \n\t\t\t\t\t\t
      \n\t\t\t\t
      \n\t\t\t\t\t\t\t
      \n\t\t\t
      <\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

      \u9ad8\u5242\u91cf\u690d\u5165\u9664\u80f6\uff08HDIS\uff09 \u9ad8\u5242\u91cf\u690d\u5165\u540e\u7684\u5149\u523b\u80f6\u53bb\u9664\uff0c\u4ecd\u662f\u534a\u5bfc\u4f53\u5de5\u4e1a\u6700\u82db\u523b\u7684\u5de5\u827a\u4e4b\u4e00\u3002 \u9762\u4e34\u7684\u6311\u6218\u662f\u5728\u4e0d\u70e7\u5916\u58f3 […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[2179,2242],"tags":[],"class_list":["post-6937","post","type-post","status-publish","format-standard","hentry","category-2179","category-2242"],"acf":[],"yoast_head":"\n\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6 - Muegge<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6 - Muegge\" \/>\n<meta property=\"og:description\" content=\"\u9ad8\u5242\u91cf\u690d\u5165\u9664\u80f6\uff08HDIS\uff09 \u9ad8\u5242\u91cf\u690d\u5165\u540e\u7684\u5149\u523b\u80f6\u53bb\u9664\uff0c\u4ecd\u662f\u534a\u5bfc\u4f53\u5de5\u4e1a\u6700\u82db\u523b\u7684\u5de5\u827a\u4e4b\u4e00\u3002 \u9762\u4e34\u7684\u6311\u6218\u662f\u5728\u4e0d\u70e7\u5916\u58f3 […]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/\" \/>\n<meta property=\"og:site_name\" content=\"Muegge\" \/>\n<meta property=\"article:published_time\" content=\"2019-12-05T10:21:42+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2020-08-05T14:15:06+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/muegge.de\/wp-content\/uploads\/2019\/12\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg\" \/>\n<meta name=\"author\" content=\"Steven Guggolz\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u4f5c\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"Steven Guggolz\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/\"},\"author\":{\"name\":\"Steven Guggolz\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#\\\/schema\\\/person\\\/e21b90232b4c3e83f26157c3cd5cf452\"},\"headline\":\"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6\",\"datePublished\":\"2019-12-05T10:21:42+00:00\",\"dateModified\":\"2020-08-05T14:15:06+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/\"},\"wordCount\":20,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#organization\"},\"image\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/muegge.de\\\/wp-content\\\/uploads\\\/2019\\\/12\\\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg\",\"articleSection\":[\"\u534a\u5bfc\u4f53\",\"\u5fae\u673a\u7535\u7cfb\u7edf\"],\"inLanguage\":\"zh-Hans\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/\",\"name\":\"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6 - Muegge\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/muegge.de\\\/wp-content\\\/uploads\\\/2019\\\/12\\\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg\",\"datePublished\":\"2019-12-05T10:21:42+00:00\",\"dateModified\":\"2020-08-05T14:15:06+00:00\",\"inLanguage\":\"zh-Hans\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/photoresist-removal-after-high-dose-implant-hdis\\\/#primaryimage\",\"url\":\"https:\\\/\\\/muegge.de\\\/wp-content\\\/uploads\\\/2019\\\/12\\\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg\",\"contentUrl\":\"https:\\\/\\\/muegge.de\\\/wp-content\\\/uploads\\\/2019\\\/12\\\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#website\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/\",\"name\":\"MUEGGE\",\"description\":\"Ihr Partner f\u00fcr industrielle Mikrowellen\u00ad und Plasmasysteme\",\"publisher\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"zh-Hans\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#organization\",\"name\":\"MUEGGE Group\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/muegge-group.com\\\/wp-content\\\/uploads\\\/2021\\\/05\\\/muegge-logo.svg\",\"contentUrl\":\"https:\\\/\\\/muegge-group.com\\\/wp-content\\\/uploads\\\/2021\\\/05\\\/muegge-logo.svg\",\"width\":140,\"height\":46,\"caption\":\"MUEGGE Group\"},\"image\":{\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/de.linkedin.com\\\/company\\\/muegge\"]},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/muegge-group.com\\\/fr\\\/#\\\/schema\\\/person\\\/e21b90232b4c3e83f26157c3cd5cf452\",\"name\":\"Steven Guggolz\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-Hans\",\"@id\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/0c59faa16885a6ac142ad2eb751d619a464663632d58266e12c2d4d7cc56373c?s=96&d=mm&r=g\",\"url\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/0c59faa16885a6ac142ad2eb751d619a464663632d58266e12c2d4d7cc56373c?s=96&d=mm&r=g\",\"contentUrl\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/0c59faa16885a6ac142ad2eb751d619a464663632d58266e12c2d4d7cc56373c?s=96&d=mm&r=g\",\"caption\":\"Steven Guggolz\"},\"url\":\"https:\\\/\\\/muegge-group.com\\\/zh-hans\\\/author\\\/stguggolz\\\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6 - Muegge","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/","og_locale":"zh_CN","og_type":"article","og_title":"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6 - Muegge","og_description":"\u9ad8\u5242\u91cf\u690d\u5165\u9664\u80f6\uff08HDIS\uff09 \u9ad8\u5242\u91cf\u690d\u5165\u540e\u7684\u5149\u523b\u80f6\u53bb\u9664\uff0c\u4ecd\u662f\u534a\u5bfc\u4f53\u5de5\u4e1a\u6700\u82db\u523b\u7684\u5de5\u827a\u4e4b\u4e00\u3002 \u9762\u4e34\u7684\u6311\u6218\u662f\u5728\u4e0d\u70e7\u5916\u58f3 […]","og_url":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/","og_site_name":"Muegge","article_published_time":"2019-12-05T10:21:42+00:00","article_modified_time":"2020-08-05T14:15:06+00:00","og_image":[{"url":"https:\/\/muegge.de\/wp-content\/uploads\/2019\/12\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg","type":"","width":"","height":""}],"author":"Steven Guggolz","twitter_card":"summary_large_image","twitter_misc":{"\u4f5c\u8005":"Steven Guggolz"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/#article","isPartOf":{"@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/"},"author":{"name":"Steven Guggolz","@id":"https:\/\/muegge-group.com\/fr\/#\/schema\/person\/e21b90232b4c3e83f26157c3cd5cf452"},"headline":"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6","datePublished":"2019-12-05T10:21:42+00:00","dateModified":"2020-08-05T14:15:06+00:00","mainEntityOfPage":{"@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/"},"wordCount":20,"commentCount":0,"publisher":{"@id":"https:\/\/muegge-group.com\/fr\/#organization"},"image":{"@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/#primaryimage"},"thumbnailUrl":"https:\/\/muegge.de\/wp-content\/uploads\/2019\/12\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg","articleSection":["\u534a\u5bfc\u4f53","\u5fae\u673a\u7535\u7cfb\u7edf"],"inLanguage":"zh-Hans","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/","url":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/","name":"\u9ad8\u5242\u91cf\u690d\u5165\uff08HDIS\uff09\u540e\u9664\u80f6 - Muegge","isPartOf":{"@id":"https:\/\/muegge-group.com\/fr\/#website"},"primaryImageOfPage":{"@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/#primaryimage"},"image":{"@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/#primaryimage"},"thumbnailUrl":"https:\/\/muegge.de\/wp-content\/uploads\/2019\/12\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg","datePublished":"2019-12-05T10:21:42+00:00","dateModified":"2020-08-05T14:15:06+00:00","inLanguage":"zh-Hans","potentialAction":[{"@type":"ReadAction","target":["https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/"]}]},{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/muegge-group.com\/photoresist-removal-after-high-dose-implant-hdis\/#primaryimage","url":"https:\/\/muegge.de\/wp-content\/uploads\/2019\/12\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg","contentUrl":"https:\/\/muegge.de\/wp-content\/uploads\/2019\/12\/muegge-blog-quality-leaps-in-micromachinery-and-mems-01.jpg"},{"@type":"WebSite","@id":"https:\/\/muegge-group.com\/fr\/#website","url":"https:\/\/muegge-group.com\/fr\/","name":"MUEGGE","description":"Ihr Partner f\u00fcr industrielle Mikrowellen\u00ad und Plasmasysteme","publisher":{"@id":"https:\/\/muegge-group.com\/fr\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/muegge-group.com\/fr\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-Hans"},{"@type":"Organization","@id":"https:\/\/muegge-group.com\/fr\/#organization","name":"MUEGGE Group","url":"https:\/\/muegge-group.com\/fr\/","logo":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/muegge-group.com\/fr\/#\/schema\/logo\/image\/","url":"https:\/\/muegge-group.com\/wp-content\/uploads\/2021\/05\/muegge-logo.svg","contentUrl":"https:\/\/muegge-group.com\/wp-content\/uploads\/2021\/05\/muegge-logo.svg","width":140,"height":46,"caption":"MUEGGE Group"},"image":{"@id":"https:\/\/muegge-group.com\/fr\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/de.linkedin.com\/company\/muegge"]},{"@type":"Person","@id":"https:\/\/muegge-group.com\/fr\/#\/schema\/person\/e21b90232b4c3e83f26157c3cd5cf452","name":"Steven Guggolz","image":{"@type":"ImageObject","inLanguage":"zh-Hans","@id":"https:\/\/secure.gravatar.com\/avatar\/0c59faa16885a6ac142ad2eb751d619a464663632d58266e12c2d4d7cc56373c?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/0c59faa16885a6ac142ad2eb751d619a464663632d58266e12c2d4d7cc56373c?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/0c59faa16885a6ac142ad2eb751d619a464663632d58266e12c2d4d7cc56373c?s=96&d=mm&r=g","caption":"Steven Guggolz"},"url":"https:\/\/muegge-group.com\/zh-hans\/author\/stguggolz\/"}]}},"_links":{"self":[{"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/posts\/6937","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/comments?post=6937"}],"version-history":[{"count":0,"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/posts\/6937\/revisions"}],"wp:attachment":[{"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/media?parent=6937"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/categories?post=6937"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/muegge-group.com\/zh-hans\/wp-json\/wp\/v2\/tags?post=6937"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}