Muegge Products

Plasma components

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Radical plasma source (Remote Plasma Source) (37)
Plasma array (large area) (9)
Atmospheric Plasma Source (2)
Down-Streem-Plasma-Source (2)
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Etching & Deposition (46)
Gas- /Material Transformation (4)
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2000 (21)
3000 (20)
2x 3000 (3)
10000 (1)
100000 (1)
1250 (1)
2x 2000 (1)
6000 (1)
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Plasma area 320 mm x 320 mm (5)
others (4)
Plasma area 338 mm x 408 mm (1)
Plasma area 520 mm x 340 mm (1)
Plasma area 700 mm x 226 mm (1)
Plasma area 797,5 mm x 150 mm (1)
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Ceramics (31)
Sapphire (15)
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2450 (47)
915 (3)
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230 / 208 (37)
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Coaxial (3)
WR975 / R9 (3)
WR340 / R26 (1)
50 Products in
Plasma components

MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.