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others (4)
Plasma area 338 mm x 408 mm (1)
Plasma area 520 mm x 340 mm (1)
Plasma area 700 mm x 226 mm (1)
Plasma area 797,5 mm x 150 mm (1)
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50 Products in
Plasma components-
Atmospheric Plasma Source
Item number: MA075KA-019BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]75000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outletouter ø131 mm. inner ø80 mm -
Atmospheric Plasma Source
Item number: MA6000A-013BB
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]6000Frequency [MHz]2450Waveguide sizeWR340 / R26Reactor outletø30 mm x 1,5 mm x 200 mm -
Down-Streem-Plasma-Source
Item number: MA010KD-013BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]10000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet- -
Down-Streem-Plasma-Source
Item number: MA100KD-013BF
ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]100000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet-Down-Streem-Plasma-Quelle
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Plasma array (large area)
Item number: MA4000Y-013BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-083BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]3000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-093BC
ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-103BC
ProcessEtching & DepositionOutput Connection TypePlasma area 338 mm x 408 mmDielectric materialCeramicsOutput Power [W]2x 2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.