Muegge Products
Plasma components
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    Atmospheric Plasma SourceItem number: MA075KA-019BF ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]75000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outletouter ø131 mm. inner ø80 mm
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    Atmospheric Plasma SourceItem number: MA6000A-013BB ProcessGas- /Material TransformationOutput Connection TypeothersDielectric materialQuartzOutput Power [W]6000Frequency [MHz]2450Waveguide sizeWR340 / R26Reactor outletø30 mm x 1,5 mm x 200 mm
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    Down-Streem-Plasma-SourceItem number: MA010KD-013BF ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]10000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet-
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    Down-Streem-Plasma-SourceItem number: MA100KD-013BF ProcessGas- /Material TransformationOutput Connection TypeothersDielectric material-Output Power [W]100000Frequency [MHz]915Waveguide sizeWR975 / R9Reactor outlet-Down-Streem-Plasma-Quelle 
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    Plasma array (large area)Item number: MA4000Y-013BC ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle 
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    Plasma array (large area)Item number: MA4000Y-083BC ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]3000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle 
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    Plasma array (large area)Item number: MA4000Y-093BC ProcessEtching & DepositionOutput Connection TypePlasma area 320 mm x 320 mmDielectric materialCeramicsOutput Power [W]2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle 
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    Plasma array (large area)Item number: MA4000Y-103BC ProcessEtching & DepositionOutput Connection TypePlasma area 338 mm x 408 mmDielectric materialCeramicsOutput Power [W]2x 2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle 
MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.


 
                     
                     
                     
                     
                     
                     
                     
                     
                                             
                                             
                                             
                                             
                                             
                                             
                                             
                                             
                                            