Muegge Products
Plasma components
-
Radical plasma source (Remote Plasma Source)
Item number: MA1250C-003BC
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]1250Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-083BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-123BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-133BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-143BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-223BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-233BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
-
Radical plasma source (Remote Plasma Source)
Item number: MA2000C-703BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
MUEGGE offers plasma components for various applications to support the development and integration of your systems. Our product portfolio provides the right plasma components for low impact, high-density and highly selective etching, separation or cleaning.