Muegge Products
Plasma systems
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Decapsulation-ToolItem number: MA1250D-114BB
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Decapsulation-ToolItem number: MA3000D-211BB
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Decapsulation-ToolItem number: MA3000D-241BB
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Decapsulation-Tool
Item number: MA3000D-281BB
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Decapsulation-Tool
Item number: MA3000D-311BB
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Stripping-ToolItem number: MA0000D-001BB
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Stripping-Tool
Item number: MA1250D-110BB
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Stripping-ToolItem number: MA1250D-112BB
PLASMA SYSTEMS
Semiconductor components have become indispensable for products of our daily life. Nobody wants to imagine a future without them. However, the manufacture of these devices requires highly sophisticated equipment and in-depth process knowledge – and as technology advances, the challenges for plasma and for the control of plasma-assisted applications are increasing.
We work closely with customers and research institutes to understand the market and provide you with optimal microwave solutions – going beyond conventional plasma approaches to develop products that will significantly improve your results and processes. Our leading position as a manufacturer of microwave-assisted plasma products helps you to enter the market faster and more cost-effectively with customized systems:
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- SU-8 removal
- Highly selective removal of organic materials
- Non-oxidizing chemistry for cleaning of oxygen sensitive materials (H2 process)
- Cleaning of 3D structures
- Damage-free cleaning of sensitive surfaces (e.g. sensors)
- Isotropic chamber cleaning
- LIGA process (lithography, electroplating and shaping)
