Plasma array (large area) - MA4000Y-013BC - Muegge

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Plasma array (large area) - MA4000Y-013BC

Item number: MA4000Y-013BC Plasma components

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Additional information

Typ	Plasma array (large area)
Process	Etching & Deposition
Output Connection Type	Plasma area 320 mm x 320 mm
Dielectric material	Ceramics
Output Power [W]	2000
Frequency [MHz]	2450
Gas manifold	Single

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