Plasma array (large area) - MA4000Y-103BC - Muegge

Contact

Microwave generators

Plasma components

Waveguide components

Back to Overview

Plasma array (large area) - MA4000Y-103BC

Item number: MA4000Y-103BC Plasma components

download datasheet

Additional information

Typ	Plasma array (large area)
Process	Etching & Deposition
Output Connection Type	Plasma area 338 mm x 408 mm
Dielectric material	Ceramics
Output Power [W]	2x 2000
Frequency [MHz]	2450
Gas manifold	Single

WatchlistBereits auf der Merkliste

Related products

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-083BB

Process

Etching & Deposition

Output Connection Type

Atmospheric Plasma Source

Item number: MA6000A-013BB

Process

Gas- /Material Transformation

Output Connection Type

others

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-913BB

Process

Etching & Deposition

Output Connection Type

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-903BB

Process

Etching & Deposition

Output Connection Type

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-873BB

Process

Etching & Deposition

Output Connection Type

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-863BB

Process

Etching & Deposition

Output Connection Type

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-823BB

Process

Etching & Deposition

Output Connection Type

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-793BB

Process

Etching & Deposition

Output Connection Type

Radical plasma source (Remote Plasma Source)

Item number: MA2000C-783BB

Process

Etching & Deposition

Output Connection Type