Muegge Products
Product Search Results: plasma deposition
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-753BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-783BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-793BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialCeramicsMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-823BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-863BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-873BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Radical plasma source (Remote Plasma Source)
Item number: MA2000C-903BB
ProcessEtching & DepositionOutput Connection TypeDielectric materialSapphireMains voltage nominal [V]230 / 208Output Power [W]2000Frequency [MHz]2450Radikalquelle (Remote-Plasma-Quelle)
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Plasma array (large area)
Item number: MA6000Y-013BC
ProcessEtching & DepositionOutput Connection TypePlasma area 700 mm x 226 mmDielectric materialCeramicsOutput Power [W]2x 3000Frequency [MHz]2450Gas manifoldDoubleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA6000Y-033BC
ProcessEtching & DepositionOutput Connection TypePlasma area 520 mm x 340 mmDielectric materialCeramicsOutput Power [W]2x 3000Frequency [MHz]2450Gas manifoldDoubleFlächenplasmaquelle
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Plasma array (large area)
Item number: MA4000Y-103BC
ProcessEtching & DepositionOutput Connection TypePlasma area 338 mm x 408 mmDielectric materialCeramicsOutput Power [W]2x 2000Frequency [MHz]2450Gas manifoldSingleFlächenplasmaquelle
MUEGGE Group
Hochstrasse 4 – 6
64385 Reichelsheim
Germany
Gerling Applied Engineering, Inc.
P.O. Box 580816
Modesto, CA 95358-0816
USA
MUEGGE Group
Hochstrasse 4 – 6
64385 Reichelsheim
Germany
Gerling Applied Engineering, Inc.
P.O. Box 580816
Modesto, CA 95358-0816
USA
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