Muegge Products

Plasma systems

Plasma systems
  • Decapsulation-Tool

    Item number: MA1250D-114BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    480
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-211BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    CF4
    Process gas 5
    SF6
    Process gas 6
    Ar
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-241BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    CF4
    Process gas 4
    N2H2
    Process gas 5
    SF6
    Process gas 6
    N2
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-281BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    N2H2
    Process gas 3
    CF4
    Process gas 4
    N2
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Decapsulation-Tool

    Item number: MA3000D-311BB

    Type of tool
    High Volume Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    O2
    Process gas 3
    N2
    Process gas 4
    Ar
    Process gas 5
    CF4
    Process gas 6
    SF6
    Product Temperature sensors
    –
    Chamber size [mm (inch)]
    320 x 320 (12.60 x 12.60)
    More details
  • Stripping-Tool

    Item number: MA0000D-001BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-110BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    208
    Process gas 1
    O2
    Process gas 2
    N2
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details
  • Stripping-Tool

    Item number: MA1250D-112BB

    Type of tool
    R&D / Pilot Production Tool
    Line Voltage [V]
    400
    Process gas 1
    O2
    Process gas 2
    CF4
    Process gas 3
    N2
    Process gas 4
    –
    Process gas 5
    –
    Process gas 6
    –
    Product Temperature sensors
    2
    Chamber size [mm (inch)]
    245 x 245 (9.65 x 9.65)
    More details

PLASMA SYSTEMS

Semiconductor components have become indispensable for products of our daily life. Nobody wants to imagine a future without them. However, the manufacture of these devices requires highly sophisticated equipment and in-depth process knowledge – and as technology advances, the challenges for plasma and for the control of plasma-assisted applications are increasing.

We work closely with customers and research institutes to understand the market and provide you with optimal microwave solutions – going beyond conventional plasma approaches to develop products that will significantly improve your results and processes. Our leading position as a manufacturer of microwave-assisted plasma products helps you to enter the market faster and more cost-effectively with customized systems:

.

  • SU-8 removal
  • Highly selective removal of organic materials
  • Non-oxidizing chemistry for cleaning of oxygen sensitive materials (H2 process)
  • Cleaning of 3D structures
  • Damage-free cleaning of sensitive surfaces (e.g. sensors)
  • Isotropic chamber cleaning
  • LIGA process (lithography, electroplating and shaping)