Radical plasma source (Remote Plasma Source) - MA3000C-463BB - Muegge

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Radical plasma source (Remote Plasma Source) - MA3000C-463BB

Item number: MA3000C-463BB Plasma components

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Additional information

Typ	Radical plasma source (Remote Plasma Source)
Process	Etching & Deposition
Output Connection Type
Dielectric material	Ceramics
Mains voltage nominal [V]	230 / 208
Output Power CW [W]	3000
Frequency [MHz]	2450

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