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Viele Branchen entdecken die Mikrowellen- und Plasmatechnologie für sich - um Prozesse zu beschleunigen, zu präzisieren, energieeffizienter zu gestalten. Als weltweit führender Hersteller bewegen sich unsere Experten an der Quelle der Entwicklungen. Steigen Sie im MUEGGE Blog tiefer ein in die Materie aus der die Energielösungen der Zukunft bestehen..

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Microwave-Technology / Power-to-X Applications / Semi-Conductor Duo-Plasmaline for Green Technology: Always a step ahead in productivity and throughput

How Duo-Plasmaline systems bring power to your sustainable energy applications Everybody wants to live on a healthier planet! Innovators from all industries are working hard …

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MEMS / Semi-Conductor Removal of Black Carbon and Organic Residues

Rework and Removal of C-based Materials – A challenge not only for semiconductor manufacturer The deposition of carbon-based materials plays a major role in semiconductor …

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Automotive / Lab-Grown-Diamonds / MEMS / Microwave-Technology / Semi-Conductor Reflected Power in Microwave (-Plasma) Processes

The reflected power is defined as the portion of the generated microwave power that is not coupled into the process and that returns back to …

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Semi-Conductor Microwave and Chamber-Clean

Chamber-Clean after Dielectrics Deposition – A case for isotropic microwave plasma As deposition is one of the pillars of semiconductor production, it depends on a …

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Automotive / MEMS / Microwave-Technology / Semi-Conductor 3D-Simulation: Slim Down Your Component Development Process

While developing thermoprocessing equipment, testing of prototypes and numerous repetitions cost plenty oftime and resources. 3D simulation capabilities allow you to speed up your prototyping …

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MEMS / Semi-Conductor Photoresist Removal after High Dose Implant (HDIS)

High Dose Implant Strip (HDIS) – Challengeable process in semiconductor manufacturing Photoresist strip after high dose implant strip remains one of the most demanding processes …

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MEMS / Semi-Conductor Endpoint Control for Thick Photoresist Removal

Complete removal of thick photoresist needs proper endpoint detection Applying microwave (MW) plasma to remove thick resist such as used for micro-machinery and microelectromechanical systems …

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MEMS / Semi-Conductor Quality Improvement in Micromachinery and MEMS

Removal of thick and embedded photoresist – A case for isotropic microwave plasma Microwave plasma is the perfect solution for removing thick resist such as …

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MUEGGE provides solutions for breaking down the greenhouse gases CO2 and methane by atmospheric plasma. Watch our explainer video and learn how our microwave assisted plasma technology can help combat climate change.

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