Video of MUEGGE’s
Remote Plasma Source (RPS)

Looking for a powerful, easy-to-integrate Remote Plasma Source for your application?

In this video, we walk you through the system architecture, key functionalities, and integration options of our microwave-based 3 kW RPS, so you can see exactly how it fits into your setup.

✔️ High Density Plasma
✔️ Pure Isotropic Plasma
✔️ No Ion Bombardment

Schlagworte

Plasma, Semiconductor

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Video of MUEGGE’s Remote Plasma Source (RPS)

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Video of MUEGGE’s
Remote Plasma Source (RPS)

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